“…[16][17][18] However, due to the low reactivity of methane-caused by the highly symmetric geometry of the molecule-it often needs to be decomposed by, for instance, a plasma in the MBE reactor. Other dopants reported for MBE, halide vapor phase epitaxy, or metal organic vapor phase epitaxy are tetrabromomethane (CBr 4 ), 19,20 acetylene (C 2 H 2 ), 21 propane (C 3 H 8 ), 22 hydrogen cyanide (HCN), 23 carbon disulfide (CS 2 ), and carbon tetrachloride (CCl 4 ). 24 However, no thorough comparative investigation of carbon doping efficiency in GaN using different hydrocarbons has been published.…”