2007
DOI: 10.1063/1.2800278
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Photoluminescence in phosphorous-implanted ZnO films

Abstract: ZnO thin films prepared by pulsed laser deposition were implanted with phosphorous (P) using dose levels of 1012–1014ions∕cm2 at room temperature. The P-implanted films were subsequently annealed between 500 and 700°C in oxygen ambient. The Hall effect measurements revealed a substantial reduction in the electron concentration of the P-implanted films without annealing, whereas the reduction was more pronounced with optimized rapid thermal annealing treatment. The photoluminescence spectra showed emissions ass… Show more

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Cited by 20 publications
(12 citation statements)
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“…However, p-type doping of ZnO is still a major challenge for device fabrication. For the purpose of p-type ZnO preparation, N, As and P have been incorporated through thin film growth doping [2,3] and ion implantation [4,5]. These research results indicate that stable p-type ZnO is difficult to obtain and the doped ZnO is still n-type in most cases [6,7].…”
Section: Introductionmentioning
confidence: 91%
“…However, p-type doping of ZnO is still a major challenge for device fabrication. For the purpose of p-type ZnO preparation, N, As and P have been incorporated through thin film growth doping [2,3] and ion implantation [4,5]. These research results indicate that stable p-type ZnO is difficult to obtain and the doped ZnO is still n-type in most cases [6,7].…”
Section: Introductionmentioning
confidence: 91%
“…This indicates that the ZnO nanorods were grown with c-axis preferred orientation, which is because the (001) basal plane of ZnO has the lowest surface energy. 13 However, the value of the TC (002) was dramatically decreased by further increase in the Cd mole fraction. It is wellknown that the FWHM of the ZnO (002) diffraction peak is closely related to both grain size and crystal quality.…”
Section: Methodsmentioning
confidence: 99%
“…P is also considered to be one of the suitable dopants. Although p-type conduction can be realized with P-doping in ZnO by several methods, the reliability of the p-type behavior remains questionable [6][7][8][9][10]; the electronic structure and optical properties have not been completely understood. Therefore, theoretical investigations of the P and donors codoped ZnO systems are necessary.…”
Section: Introductionmentioning
confidence: 99%