“…These values were summarized in Table 2. This result shows that the all oxide films have an impurity levels in the original band gap because the value of 4.6-4.9 eV agrees well with previously reported band gap energy for ZrO 2 films, 4.8 eV [1,2,10,11]. It suggests that the sub-band was formed by doped elements or hydrogen or oxygen vacancy.…”