“…The size of the microapertures is strongly dependent on the material in which the aperture is machined and on the fabrication technique. Nanometer-sized apertures are reported for silicon, silicon nitride and porous alumina substrates [107,113,[118][119][120][121][122], whereas in glass and polymer-based devices the apertures mainly remain in the micrometer range. Similarly, the seal resistance is affected by the nature of the material, and does not only depend on the size of the aperture.…”