We have improved lifetime and low driving voltage of the device using an electrode modified by a silane-based fluorinated self-assembled monolayer (FSAM) on ITO (transparent electrode). In the process of fabricating organic light-emitting diodes (OLEDs) devices using Ag or Cu electrode modified by a fluorinated thiol-based SAM, anomalous current saturation phenomena was observed on current-voltage characteristics only when using a thiol-SAM-modified Cu anode. When the performance of the OLED with thiol-SAM-modified Cu or Ag anode were compared with that of the OLED with FSAM-modified ITO, the thiol-SAM-modified Ag anode showed more excellent performance than the FSAM-modified ITO. The OLED with thiol-SAM-modified Cu anode also showed the strange EL efficiency behavior in the saturation current region.