Abstract:A titanium (Ti) commercial cathode material and high purity Ar and O2 were used in the cathodic arc physical vapor deposition (arc-PVD) process. The TiOx coating was deposited on the three sets of Raschig rings using decreasing ratios of Ar/O2:440/60, 400/100 and 300/100. The cross sections of the TiOx PVD coating were analyzed using field emission scanning electron microscopy (FE-SEM), X-ray energy dispersive spectroscopy (EDS), and X-ray diffraction (XRD). A homogeneous layer of Ti with small O content was o… Show more
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