Dae Solid State Physics Symposium 2018 2019
DOI: 10.1063/1.5113157
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Photocatalytic activity of nanostructured TiO2 and N-TiO2 thin films deposited onto glass using CA-PVD technique

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“…Several methods have been used for N-doping TiO 2 films, depending on the technique employed for the deposition or synthesis [10,12,18]. In the case of CAD, doping can be performed during deposition by using an O 2 /N 2 mixture as ambient gas in the chamber [19][20][21]. Another way of N-doping can be by plasma immersion ion implantation (PIII) after film deposition.…”
Section: Introductionmentioning
confidence: 99%
“…Several methods have been used for N-doping TiO 2 films, depending on the technique employed for the deposition or synthesis [10,12,18]. In the case of CAD, doping can be performed during deposition by using an O 2 /N 2 mixture as ambient gas in the chamber [19][20][21]. Another way of N-doping can be by plasma immersion ion implantation (PIII) after film deposition.…”
Section: Introductionmentioning
confidence: 99%