Photoablating characteristics of polymers irradiated by excimer laser with high repetition rates

Itō, Keiko; Moriyasu, Masaharu

doi:10.1016/0167-9317(94)90030-2

Cited by 2 publications

(4 citation statements)

References 1 publication

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In general, samples with stronger UV absorption show smaller penetration depth and therefore smaller ablation craters. 33,37 However, in the case of polymers not only the absorption of UV light but also their thermal properties and the ablation products' inuence on the ablation crater volume have to be considered. Pham et al 38 have shown a decrease in the ablation threshold with decreased glass transition temperatures.…”

Section: General Ndings Regarding Ablation Crater Rims Shapes and Vo...mentioning

confidence: 99%

See 1 more Smart Citation

Investigation on the suitability of ablated carbon as an internal standard in laser ablation ICP-MS of polymers

Deiting

Börno

Hanning

et al. 2016

J. Anal. At. Spectrom.

View full text Add to dashboard Cite

The conventional quantitative method for the analysis of inorganic elements in polymer matrices is a complex and time consuming process that presents a significant risk for error. Typically, polymers are digested in a microwave oven or other devices under high temperature and pressure for several hours while employing different mixtures of high purity acids. In many cases, particularly when high concentrations of doped elements are present, the digestion is often incomplete and therefore the reproducibility depends strongly on the type of polymer and additives used. A promising alternative technology that allows for the direct analysis of these polymers without digestion is laser ablation ICP-MS. Due to a lack of available reference materials and the presence of matrix dependent effects, a precise calibration cannot be obtained. In order to compensate for the matrix dependent effects the use of internal standardization is necessary. In this study the correlation between the carbon released during the ablation process and the 13 C signal detected by ICP-MS and its use as an internal standard are investigated. For this purpose, twenty-one virgin polymer materials are ablated; the released carbon is determined and correlated with the corresponding integrated 13 C signal. The correlation resulted in a direct relationship between the ablated carbon and 13 C signal demonstrating the potential ability to neglect at least some of the matrix dependent and transport effects which occur during the laser ablation of virgin polymers.

show abstract

Section: General Ndings Regarding Ablation Crater Rims Shapes and Vo...mentioning

confidence: 99%

“…The less smooth ablation craters were also detected for other weakly absorbing samples. 33,37 Besides the difference in the polymeric structure, resulting in different UV absorption, also the thermal properties change. Especially the glass transition temperature is a critical factor.…”

Section: General Ndings Regarding Ablation Crater Rims Shapes and Vo...mentioning

confidence: 99%

Investigation on the suitability of ablated carbon as an internal standard in laser ablation ICP-MS of polymers

Deiting

Börno

Hanning

et al. 2016

J. Anal. At. Spectrom.

View full text Add to dashboard Cite

show abstract

“…The diffraction beam for a rectangular aperture can be expressed by [51] Comparing the calculated results of the Gaussian beams (shown in Figure 3) and the diffracted beams, it was found that under the same peak fluence, the final hole depth using a diffracted beam is much less than that using a Gaussian beam. This is because there is substantial fluence beyond the beam waist for a Gaussian beam but not for a diffracted beam.…”

Section: Calculated Hole Drilling Profiles For Diffraction Incddent Bmentioning

confidence: 99%

“…According to the example shown in Figure 2b, the maximum number of shots corresponding to the maximum depth is about 2000. If 5000 shots are used for the hole drilling, about 3000 of these will not contribute to the ablation process and their energy will partially transfer to heat which may cause heat damage or a bigger heat affected zone (HAZ), especially with high repetition rate laser processing [51] or for low thermal conductivity materials. In the modeling process, it was found that the effective absorption coefficient has no direct effect on the final hole shape although there may exist a connection between the threshold fluence and the absorption coefficient [25].…”

Section: Calculated Hole Drilling Shapes With Gaussian Incident Beamsmentioning

confidence: 99%

Laser Applications in Microelectronic and Optoelectronic Manufacturing V. Volume 3933, Held at San Jose, CA, on 24-26 January 2000

Helvajian¹,

Sugioka²,

Gower³

et al. 2000

View full text Add to dashboard Cite

Volume 3933ETIG QÜALI77 rES=3323D 4 ^ZOOO/ö/9 ocj REPORT DOCUMENTATION PAGE Public reporting burden for this collection of information is estimated to average 1 hour per response, including the time for reviewing instructions, searching data sources, garnering and maintaining the data needed, and completing and reviewing the collection of Information. Send comments regarding this burden estimate or any other aspect of this collection of information, including suggestions for reducing this burden to Washington Headquarters Service, Directorate for Information Operations and Reports, 1215 Jefferson Davis Highway, Suite 1204, Arlington, VA 22202-4302, and to the Office of Management and Budget, Paperwork Reduction Project (0704-0188) Washington, DC 20503. (From -To) 15-01-2000 to 14-07-2000 PLEASE DO NOT RETURN YOUR FORM TO THE ABOVE ADDRESS. 1. REPORT DATE (DD-MM-YYYY) 08-06-2000 REPORT DATE Final Technical Report DATES COVERED TITLE AND SUBTITLELaser Applications in Microelectronic and Optoelectronic Manufacturing V 5a. CONTRACT NUMBER 5b. GRANT NUMBER F49620-00-1-0135 5c. PROGRAM ELEMENT NUMBER AUTHOR(S)Helvajian, Henry Sugioka, Koji Dubowski, Jan J. Gower, Malcom C.5d. PROJECT NUMBER 5e. TASK NUMBER 5f. WORK UNIT NUMBER PERFORMING ORGANIZATION NAME(S) AND ADDRESS(ES)Society of Photo-Optical Instrumentation Engineers PO Box 10 (SPIE) fielUngham. WA 98227-0010 PERFORMING ORGANIZATION REPORT NUMBERVolume 3933 SPONSORING/MONITORING AGENCY NAME(S) AND ADDRESS(ES)Air SPONSOR/MONITOR'S ACRONYM(S)AFOSR/NE SPONSORING/MONITORING AGENCY REPORT NUMBER DISTRIBUTION AVAILABILITY STATEMENTApproved for Public Release SUPPLEMENTARY NOTESISBN 0-8194-3550-3 ABSTRACTThis proceedings contains papers on the following topics: fundamental processes of laser material interaction phenomenon, laser material processing techniques, pulsed-laser deposition, and laser microengineering. The latter topic was added to LAMOM V and reflects the srong growth in the application of lasers to micromachining, 3D fabrication, and microtexturing operations. SUBJECT TERMS IntroductionThe laser is currently in its fourth decade of development and is emerging as the tool of choice for material processing in the 21 st century. Laser processing is by nature an environmentally "clean" and in-situ processing approach. It has a very large dynamic range of processing size from a scale that can exceed the wavelength of light to dimensions measured in many square meters. It has also been shown to process a variety of materials, from delicate matter of biological origin to diamond, the hardest material known. Therefore, one can defend the notion that the laser, as a material processing tool, has advanced to a relatively mature stage to merit an annual review of its applicability to various material processing tasks. The Laser Applications in Microelectronics and Optoelectronics Manufacturing (LAMOM) conference series is an attempt to provide a common forum for both scientific and engineering exchange to address aspects of processing materials with lase...

show abstract

Photoablating characteristics of polymers irradiated by excimer laser with high repetition rates

Cited by 2 publications

References 1 publication

Investigation on the suitability of ablated carbon as an internal standard in laser ablation ICP-MS of polymers

Investigation on the suitability of ablated carbon as an internal standard in laser ablation ICP-MS of polymers

Laser Applications in Microelectronic and Optoelectronic Manufacturing V. Volume 3933, Held at San Jose, CA, on 24-26 January 2000

Contact Info

Product

Resources

About