Photo-Robotic Positioning for Integrated Optics

Bettahar, Houari; Caspar, Alexis; Clevy, Cédric; Courjal, Nadège; Lutz, Philippe

doi:10.1109/lra.2016.2589319

Cited by 11 publications

(12 citation statements)

References 17 publications

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“…Moreover, the inclusion of force sensor at the base was another reason towards the measurement verification during the gluing process. From Figure (5) , bending of passive beam from glue curing can be until the stiffness of glue equal to stiffness of the beam. During this time, the force sensor measurement have only few oscillations (in absence of sufficient force to drive point B) as we can see from the force sensor data Figure (6).…”

Section: Assembly System Modeling and Glue Curing Analysismentioning

confidence: 99%

“…Meaning that if the movement of the beam is ceased the force measurement from the type of sensor used in the presented setup should also be ceased. This could be defined by revisiting the spring system presented in Figure ( From y A and equation (5), the overall displacement of the glue can be calculated. In Figure (10), the obtained filtered y A and calculated y AB is shown, it can be seen that the dynamic of the variation of point A and AB follows the same principle as explained with Step: 1 and Step: 2.…”

Section: Assembly System Modeling and Glue Curing Analysismentioning

confidence: 99%

“…Even with the availability of several micro-fabrication technologies, the robotized approach for precise micro-assembly is still a big need. In the recent years, there were several development in micro-assembly works, in context of different approaches such as using Laser die transfer technique [1], with microfluidic interconnection [2], and with Laser scanning confocal image alignment [3], whereas different strategies to handle complex task [4] and highly accurate assembly tasks [5]- [7] have also been demonstrated. For micro-assembly applications including MEMS devices, use of the glue is one of the widely used techniques in industries.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Analysis of Forces during UV Glue Curing for Micro-Assembly Applications

Tiwari

Clevy

Lutz

2019

2019 Symposium on Design, Test, Integration &Amp; Packaging of MEMS and MOEMS (DTIP)

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Positional drift resulted from the glue curing may result into serious challenges towards accuracy especially for micro-assembly processes. Studying forces and positional drifts resulted from the glue curing appears as a key objective towards reaching precise micro-assemblies. For this reason, works notably investigate the forces and displacements originated from the UV glue curing. Experimental investigations demonstrates that the force induced during the glue curing is in 160 µN range against a micro-object with cross section of 500 x 500 µm, and the corresponding positional drift in the 10 µm range was obtained. Works also show that these values depend on the system and strategy used for the assembly.

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Section: Assembly System Modeling and Glue Curing Analysismentioning

confidence: 99%

Section: Assembly System Modeling and Glue Curing Analysismentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Analysis of Forces during UV Glue Curing for Micro-Assembly Applications

Tiwari

Clevy

Lutz

2019

2019 Symposium on Design, Test, Integration &Amp; Packaging of MEMS and MOEMS (DTIP)

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“…Active optical way means that it is possible, under vacuum, to control the moving step of the robot in function of the properties of the transmitted light, losses, and phases. 16 The lRobotex station is a very powerful tool, especially for the LOF technologies due to the very high accuracy of the assembly and to the robotic solutions, which is necessary to control the position and the orientation of the center tool. The high accuracy of the robotic arm is necessary to set up the different components on the facet of the fiber, exactly at the optical center of the fiber, and exactly at the right position, or angle.…”

Section: Introductionmentioning

confidence: 99%

Smallest microhouse in the world, assembled on the facet of an optical fiber by origami and welded in the μRobotex nanofactory

Rauch

Lehmann

Rougeot

et al. 2018

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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In this study, the authors have demonstrated that it is possible to realize several three-dimensional (3D) micro-and nanostructures, by the fabrication of the smallest microhouse using a dual beam scanning electron microscope (SEM)/focused ion beam (FIB) Auriga 60 from Zeiss together with a six degree of freedom robot built with SmarAct components. In this new type of nanolab, cutting, etching, folding, assembling, and then welding thin membranes of silica on top of a cleaved optical fiber SMF28, or production of micro-and nanostructures, like the microhouse, are possible. The authors have experimentally shown that FIB can be used, in this new generation of micro/nanofactory, in combination with SEM, and gas injection system, in order to fabricate three-dimensional microstructures: a microhouse in this study, with ultrahigh accuracy assembly down to 10 nm. By using the theory of sputtering, the authors are able to propose a model of folding thin membranes of numerous materials such as metals, polymers, or crystals, i.e., silica, silicon, potassium tantalite, or lithium niobate. This method is usually described as origami in the literature [W. J. Aroa, H. I. Smith, and G. Barbastathis, Microelectron. Eng. 84, 1454; W. J. Aroa et al., J. Vac. Sci. Technol., B 25, 2184 and K. Chalapat et al., Adv. Mater. 25, 91 (2013)]. The experimental results indicate that the introduction of a microrobot inside the SEM vacuum chamber will provide the means to enlarge the scope of clean room facilities to build complex and smart 3D microsystems with heterogeneous materials, especially on the facet of an optical fiber in the lab on fiber new field. The authors propose a new way to easily manufacture many kinds of optical functions for light trapping based on nanoantennas, nanophotonic crystal, axicon or lattice, 3D biosensor with origami, and nanopatterning surfaces or carbon nanotubes, etc. Published by the AVS.

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“…In previous works [20] we used an active alignment based on FP interferometry because FP (Fabry-Perot) cavity almost always happens when assembling integrated optical components (it then appears extremely generic), it also provides very high measurement quality (interferometric principle) but only provides displacement measurements along the optical axis (1D). Taking that specificities into account, the originality of [20] was to combine this FP interferometry feedback with robot nanopositioning : the nanopositionning robot enables to achieve motions useful to identify the position of the optical component relative to the optical fiber, then to automatically position the two components relatively at high speed to achieve high quality optical signal (irradiance i.e. light intensity).…”

Section: Introductionmentioning

confidence: 99%

Novel Strategy for High Precision Automated Robotic Positioning based on Fabry-Perot Interferometry Principle

Bettahar¹,

Clevy²,

Behague³

et al. 2018

2018 IEEE 14th International Conference on Automation Science and Engineering (CASE)

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On account of the micro-scale building components manipulation and high precision demands, the interest is oriented toward automated robotic micro-manipulation and micro-assembly to provide low-cost, high performances, notably for integrated optical devices. The paper proposes a novel strategy for high precision fully automated robotic alignment. This strategy permits high accurate and fast automated alignment of two optical building structures (optical fiber, optical component) with optimal optical function in a known referencing between the robotic manipulator and the optical axis. The strategy allows to identify and to compensate the optical component misalignment angles and the robot translation error angles yielded from the robotic manipulator. The approach relies on robotic positioning combined with the use of Fabry-Perot interferometry of the reflected light irradiance for closed loop control. Fabry-Perot interference principle is especially used to give a rapid and high precision measurement. A photo-robotic positioning model is proposed that relates the optical component misalignment angles and robot translation error angles with the Fabry-Perot measurements. A 6 Degree-Of-Freedom (DOF) robotic platform is used to relatively align an optical component to an optical fiber for experimental validation. The obtained results leads to robotic positioning uncertainty of about 0.0021 • and alignment time of less than 12 s.

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Photo-Robotic Positioning for Integrated Optics

Cited by 11 publications

References 17 publications

Analysis of Forces during UV Glue Curing for Micro-Assembly Applications

Analysis of Forces during UV Glue Curing for Micro-Assembly Applications

Smallest microhouse in the world, assembled on the facet of an optical fiber by origami and welded in the μRobotex nanofactory

Novel Strategy for High Precision Automated Robotic Positioning based on Fabry-Perot Interferometry Principle

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