Photo-resist stripping process using atmospheric micro-plasma system

Chen, H. H.; Weng, Chih-Chiang; Liao, Jiunn Der; Chen, K. M.; Hsu, Bo Wen

doi:10.1088/0022-3727/42/13/135201

Cited by 11 publications

(9 citation statements)

References 20 publications

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“…The presence of chemical species is demonstrated in Figure 2(a) which shows typical optical spectra emitted from Ar both without and with an entrained CCl 4 vapor. Figure 2(a) clearly shows the presence of Cl, Cl 2 and C 2 species in addition to the excited Ar neutral species,12–14 when haloalkane chemistry is added to the plasma jet. Cl 2 emission at 258 nm15, 16 from Ar, Ar/CH 2 Cl 2 , Ar/CHCl 3 , and Ar/CCl 4 is shown in Figure 2(b) to compare the relative amount of Cl 2 generated in the plasma, which contribute to the tissue removal rate.…”

Section: Methodsmentioning

confidence: 99%

Chemical‐Driven Tissue Removal and Removal Profiles by Atmospheric Plasma Irradiation

Koo

Moore

Choi

et al. 2011

Plasma Processes & Polymers

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We demonstrate the application of RF‐excited plasma to remove localized regions of ex vivo tissue. While some limited tissue removal occurs when using discharges in rare gases alone, the addition of chemical precursors results in an enhancement of etch depth and etch profile under essentially identical plasma conditions of delivered power, applied voltage, and gas flow. Specifically, the material removal rate in our experiments using different CH4−xClx additives increased with both (i) the molecular chlorine content (x = 2,3,4) of the selected additive, and (ii) the concentration of haloalkane vapor in the gas stream. We attribute this enhancement to the generation and delivery of chemically reactive radicals from the plasma to the tissue, followed by formation of volatile products (i.e., a chemical, rather than physical or thermal, tissue removal process). In addition we observed that cross‐sectional etch profiles differed with the chosen haloalkane additive chemistries, indicative of corresponding differences in chemistries on profile side‐walls versus bottom walls.

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Section: Methodsmentioning

confidence: 99%

Chemical‐Driven Tissue Removal and Removal Profiles by Atmospheric Plasma Irradiation

Koo

Moore

Choi

et al. 2011

Plasma Processes & Polymers

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“…Discharge at atmospheric pressure does not require the use of expensive vacuum pumps. Due to its specifi c features, fi elds of plasma application are very wide: from biomedicine (sterilization, deactivation of bacteria and viruses on living tissues) via UV and VUV radiation as well as visible light sources and in gas processing to typical technical application (treatment and modifi cation of various surfaces) [3][4][5][6][7][8][9][10][11][12].…”

Section: Introductionmentioning

confidence: 99%

Microwave plasma for hydrogen production from liquids

et al. 2016

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Abstract. The hydrogen production by conversion of liquid compounds containing hydrogen was investigated experimentally. The waveguide-supplied metal cylinder-based microwave plasma source (MPS) operated at frequency of 915 MHz at atmospheric pressure was used. The decomposition of ethanol, isopropanol and kerosene was performed employing plasma dry reforming process. The liquid was introduced into the plasma in the form of vapour. The amount of vapour ranged from 0.4 to 2.4 kg/h. Carbon dioxide with the fl ow rate ranged from 1200 to 2700 NL/h was used as a working gas. The absorbed microwave power was up to 6 kW. The effect of absorbed microwave power, liquid composition, liquid fl ow rate and working gas fl ow rate was analysed. All these parameters have a clear infl uence on the hydrogen production effi ciency, which was described with such parameters as the hydrogen production rate [NL(H 2 )/h] and the energy yield of hydrogen production [NL(H 2 )/kWh]. The best achieved experimental results showed that the hydrogen production rate was up to 1116 NL(H 2 )/h and the energy yield was 223 NL(H 2 ) per kWh of absorbed microwave energy. The results were obtained in the case of isopropanol dry reforming. The presented catalyst-free microwave plasma method can be adapted for hydrogen production not only from ethanol, isopropanol and kerosene, but also from different other liquid compounds containing hydrogen, like gasoline, heavy oils and biofuels.

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“…Jung and Choi (2006) had etched PR material by Ar/O 2 and He/O 2 gas. Chen et al (2009) had also stripped PR material based on the APPJ system and considered N 2 and Ar as working gas. Yoshiki et al (2002) had locally etched PR material based on micro-APPJ, used O 2 as working gas; an RF source (13.56 MHz) was used.…”

Section: Introductionmentioning

confidence: 99%

An experimental study of photoresist material etching by an atmospheric-pressure plasma jet with Ar/air mixed gas

Wang¹,

Ning²,

Fu³

et al. 2013

J. Plasma Phys.

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In this paper, electrical and optical emission spectrometer (OES) characteristics of an Ar/air atmospheric-pressure plasma jet (APPJ) based on the plasma needle and plasma pencil systems were investigated and analyzed. Electrical measurement results showed that the breakdown and working voltage of the jet increased with the increase of the ratio of air/Ar, and the emission intensity of Ar* significantly decreased. For the plasma needle, when the ratio of air/Ar reached 1, the OES characteristics of Ar/air were similar to those of air plasma, and the main excited species was N2*. For the plasma pencil, when a little air impurity was added in Ar, the emission intensities of N2* species will be significantly increased. Based on these two APPJ systems, photoresist materials were etched, etched results showed that the etched surface was easier to be oxidized with the addition of air into Ar. The etched surface was cleaner with pure Ar plasma with scanning substrate methods than that with the Ar/air mixture. Etched results of higher ratios of air/Ar plasma were similar to those of air plasma.

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Photo-resist stripping process using atmospheric micro-plasma system

Cited by 11 publications

References 20 publications

Chemical‐Driven Tissue Removal and Removal Profiles by Atmospheric Plasma Irradiation

Chemical‐Driven Tissue Removal and Removal Profiles by Atmospheric Plasma Irradiation

Microwave plasma for hydrogen production from liquids

An experimental study of photoresist material etching by an atmospheric-pressure plasma jet with Ar/air mixed gas

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