Green light emitting diodes (LED) produced by LPE‐technology are testet for different stress stages using the scanning electron microscope and the deep level transient spectroscopy (DLTS). Beside the n‐ and p‐region the light output on unstressed LED is determined by a high efficient intrinsic interlayer adjoining the transition. The short‐time deterioration of the electroluminescent efficiency is determined by the rapid degradation of the interlayer correlated with the creation of a PGa‐antisite. The degradation of the n‐ and p‐region causes the long‐time decreasing electroluminescence efficiency.