Phosphorus Mediated Growth of Ge Layer on Si(001) Substrate

Hanafusa, H.; Hirose, Nobuyoshi; Kasamatsu, A.; Mimura, Tsunehiro; Matsui, Toshiyuki; Suda, Yoshiaki

doi:10.7567/ssdm.2011.m-8-5

Extended Abstracts of the 2011 International Conference on Solid State Devices and Materials 2011

DOI: 10.7567/ssdm.2011.m-8-5

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Phosphorus Mediated Growth of Ge Layer on Si(001) Substrate

H. Hanafusa¹,

Nobuyoshi Hirose²,

A. Kasamatsu³

et al.

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Phosphorus Mediated Growth of Ge Layer on Si(001) Substrate

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References 11 publications

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