Phosphinochalcogenoic amidato complexes of zinc and cadmium as novel single‐source precursors for the deposition of metal selenide and telluride films

Abstract

Potential single‐source precursors for metal chalcogenide semi‐conductor films, such as zinc and cadmium selenides and tellurides, have in the past proved to be difficult to synthesize, thermally unstable, or insufficiently volatile. The title compounds are found to yield high purity metal selenide and telluride films without the incorporation of nitrogen or the formation of nitro‐ gen‐containing phases.

MOCVD of Chalcogenides, Pnictides, and Heterometallic Compounds from Single-Source Molecule Precursors

“…Phosphorus-containing molecules such as Cd[(CH 3 ) 2 -PS 2 ] 2 , [47] Cd[(C 2 H 5 )PS 2 ] 2 , [48] and M[( t Bu) 2 P(Q)NR] 2 (R = i Pr, c-C 6 H 11 ; M = Zn, Cd; Q = Se, Te) [49] can be used to grow films with no risk of phosphorus incorporation. In three studies, the films were grown under vacuum, in the temperature range 400±500 C, with source temperatures in the range 160±200 C, except for Cd[( t Bu) 2 P(Te)N i Pr] 2 , which was heated to 100 C. Takahashi et al, [47] and Evans and Williams [48] noticed that pre-metallization (copper, silver, gold) of the substrate surfaces (glass or (111)InP) greatly facilitated the deposition of CdS.…”

“…In three studies, the films were grown under vacuum, in the temperature range 400±500 C, with source temperatures in the range 160±200 C, except for Cd[( t Bu) 2 P(Te)N i Pr] 2 , which was heated to 100 C. Takahashi et al, [47] and Evans and Williams [48] noticed that pre-metallization (copper, silver, gold) of the substrate surfaces (glass or (111)InP) greatly facilitated the deposition of CdS. Bwembya et al proposed the decomposition process below: [49] M[( t Bu) 2 P(Q)NR] 2 ± ? MQ + t Bu 2 P(NR)±Q±(NR)P t Bu 2 (4)…”

Chemical routes to chalcogenide materials as thin films or particles with critical dimensions with the order of nanometres

“…Bochmann et al have synthesized a range of precursors based on 2,4,6-tri-tert-butylphenylchalcogenolate, these have been used to deposit thin films of the metal sulfides or selenides in low-pressure growth experiments. [42][43][44] The mercury analogue readily decomposes, via a reductive elimination path, to form Hg and diaryldichalcogenides, which may indicate that these compounds are more suitable for photo-assisted rather than thermal MOCVD methods. 44 Park et al 45 have employed the tris-(trifluoromethyl) substituted derivative [Cd{SeC 6 H 2 (CF 3 ) 3 } 2 ], which sublimes at lower temperatures (160 C under vacuum).…”

“…[42][43][44] The mercury analogue readily decomposes, via a reductive elimination path, to form Hg and diaryldichalcogenides, which may indicate that these compounds are more suitable for photo-assisted rather than thermal MOCVD methods. 44 Park et al 45 have employed the tris-(trifluoromethyl) substituted derivative [Cd{SeC 6 H 2 (CF 3 ) 3 } 2 ], which sublimes at lower temperatures (160 C under vacuum). Films of cubic CdSe were grown on SiO 2 , Si(200) and Si (111) in the temperature range 425-475 C with growth rates ranging from 0.5 to 1 mm h À1 .…”

New Insights into the Chemistry of Imidodiphosphinates from Investigations of Tellurium-Centered Systems

“…Thus, the reaction of 2a with AuCl in the presence of triphenylphosphine, produces the monomeric complex Au(PPh3)[N(P i Pr2Te)2] (24). 24 Intriguingly, the use of 32 and the six-membered ring (Bn2SnTe)3 (Bn = benzyl). 33 In all these examples thermolysis produced thin films of metal tellurides that were contaminated with small amounts of carbon and/or the metal.…”