This work describes the growth of boron doped nanocrystalline diamond (B:NCD) films on gold coated substrates, and methodologies for achieving B:NCD with either smooth morphologies, or on top of gold nanoparticles (AuNPs) of varying sizes controlled by the surface pretreatment. B:NCD is deposited uniformly over approximately 1 cm 2 gold-coated substrates. AuNPs of ∼100 -500 nm diameter formed during microwave plasma assisted chemical vapour deposition, and these were overgrown by diamond. The size of the AuNPs under the diamond film can be increased by oxygen treatment of the surface prior to growth. AuNPs under the diamond film can be suppressed by growing a diamond nucleation layer at a lower temperature and in the presence of CO 2 in a linear antenna diamond growth reactor. Keywords: Gold 1 nanoparticles, nanocrystalline diamond, oxygen termination, linear antenna, chemical vapour depositionIn this work, the formation of gold nanoparticles (AuNPs) under boron doped nanocrystalline diamond (B:NCD) is investigated with the aim of controlling their size and formation. AuNP formation under a diamond film is shown to be suppressed by a diamond nucleation layer grown at lower temperature in the presence of CO 2 gas, and the substrate surface treatment is shown to be important for controlling the size of gold AuNPs.Diamond is radiation hard, 1 biologically inert, 2 highly resistant to corrosion, and has excellent electrochemical characteristics. [3][4][5] These properties make diamond exceptionally versatile, allowing for its use in extreme applications where no other suitable material may exist. 6 Diamond can be grafted with biomolecules, 7 as has already been demonstrated for biosensing and the fabrication of DNA chips. [8][9][10][11][12] Analysis of the chemistry of diamond and biological-molecule interfaces is critical for understanding their resulting properties. Vibrational spectroscopy gives information about the nature of bonding, conformational changes, and composition, however it can be difficult or impossible on ultra-thin layers. Raman spectroscopy, for example, is unable to assess protein layers thinner than 50 nm on diamond. 13,14 The use of diamond grown onto patterned gold substrates for Fourier-transform infrared (FTIR) spectroscopy using undoped diamond has proved to be an effective characterisation method for biomolecules on surfaces, 13,15 and for glucose sensing. 16 The use of insulating diamond substrates limits these FTIR analysis techniques to methods of functionalisation that do not use electrochemical grafting, which requires a conducting substrate. 17,18 In addition to conducting substrates for FTIR analysis techniques, other applications for both doped and undoped diamond grown on gold substrates include corrosion and abrasion resistant mirrors for harsh environments for solar tracking 19 and ultraviolet mirrors. 20The growth parameters for nanocrystalline diamond (NCD) in microwave plasma assisted chemical vapour deposition (MPACVD) resonant cavity reactors have been extensively investiga...