Phase transition and properties of Ti–Al–N thin films prepared by r.f.-plasma assisted magnetron sputtering

Mei, Zhou; Makino, Yukio; Nosé, M.; Nogi, Kiyoshi

doi:10.1016/s0040-6090(98)01364-9

Cited by 258 publications

(132 citation statements)

References 16 publications

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“…Nanoindentation results correlate with the WDS analysis, because mechanical properties increase with Al content and reach a maximum value at 43-44 at. % of Al, close to the results reported by other groups [25,36]. Moreover, the deterioration of mechanical properties with the increase in nitrogen content can be related to the achievement of saturation level due to higher nitrogen pressure leading to excess of nitrogen in the interstitial sites [37].…”

Section: Nanoindentationsupporting

confidence: 87%

XPS and AFM Investigations of Ti-Al-N Coatings Fabricated Using DC Magnetron Sputtering at Various Nitrogen Flow Rates and Deposition Temperatures

Obrosov

Gulyaev

Ratzke

et al. 2017

Metals

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Ti-Al-N coatings were deposited by direct current magnetron sputtering (DCMS) onto IN 718 at different nitrogen flow rates and deposition temperatures. The coatings' properties were characterized using atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS) as well as nanoindentation. It was found that higher deposition temperature leads to higher surface roughness and nitrogen flux influences the shape of grains. According to XPS, the bonding structure of all coatings exhibited the (Ti,Al)N phase. Mechanical properties depend on the Al content within the films. The coating with the best mechanical properties (deposited at 500 • C and 20 standard cubic centimeters per minute (sccm)) was further deposited onto tungsten carbide (WC) cutting tools for cylindrical turning experiments. A quasi-constant flank wear was observed until a machining volume of 23,500 mm 3 .

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Section: Nanoindentationsupporting

confidence: 87%

XPS and AFM Investigations of Ti-Al-N Coatings Fabricated Using DC Magnetron Sputtering at Various Nitrogen Flow Rates and Deposition Temperatures

Obrosov

Gulyaev

Ratzke

et al. 2017

Metals

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“…TiN is the most studied and used coating system for its high hardness, low coefficient of friction, and good adhesion to the substrates. However, its rapid oxidation starting at 550 °C limits the application in high speed machining [7,8]. TiCN coatings are known for their self-lubricating property and the particular low coefficient of friction [9][10][11][12].…”

Section: Introductionmentioning

confidence: 99%

“…TiAlN is also a widely applied system. The addition of Al increases coating hardness significantly [8,13]. Moreover, the formation of dense Al2O3 layer at high temperature effectively prevents the inward diffusion of oxygen, and also enhances the hot hardness and chemical stability of coatings [14,15].…”

Section: Introductionmentioning

confidence: 99%

Machining Performance of Sputter-Deposited (Al0.34Cr0.22Nb0.11Si0.11Ti0.22)50N50 High-Entropy Nitride Coatings

2015

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(Al0.34Cr0.22Nb0.11Si0.11Ti0.22)50N50 high-entropy nitride coatings prepared by reactive magnetron sputtering have been proved to have high hardness and superior oxidation resistance. Their thermal stability, adhesion strength, and cutting performance were investigated in this study. Hardness of the coating is 36 GPa, which only decreases slightly to 33 GPa after 900 °C annealing either in air or in vacuum for 2 h. No significant change in phase and microstructure were detected after annealing at 1000 °C. Rockwell C indentation and scratch tests shows that Ti interlayer provides a good adhesion between the nitride film and WC/Co substrates. In various milling tests, inserts coated with (Al0.34Cr0.22Nb0.11Si0.11Ti0.22)50N50 have evidently smaller flank wear depth than commercial inserts coated with TiN and TiAlN, even with their smaller thickness. Therefore, the (Al0.34Cr0.22Nb0.11Si0.11Ti0.22)50N50 coating has great potential in hard coating applications.

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“…The hardness of the TiAlN coating should increase with an increasing negative substrate bias due to the increasing Al content; however, there is an optimum Al content that can enhance the TiAlN hardness [12]. The hardness increases with an increasing Al concentration and reaches a maximum value at an Al concentration of 50 mol% [13]. A further increase in the Al content causes the hardness to decrease rapidly due to the appearance of the B4 structure (hexagonal structure).…”

Section: Resultsmentioning

confidence: 99%

The Mechanical and Tribology Properties of Sputtered Titanium Aluminum Nitride Coating on the Tungsten Carbide Insert Tool in the Dry Turning of Tool Steel

Budi¹,

Muhamad²,

Rahman³

2015

MST

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The effect of the sputtering parameters on the mechanical tribology properties of Titanium Aluminum Nitride coating on the tungsten cabide insert tool in the dry turning of tool steel has been investigated. The coating was deposited using a Direct Current magnetron sputtering system with various substrate biases (-79 to -221 V) and nitrogen flow rates (30 to 72 sccm). The dry turning test was carried out on a Computer Numeric Code machine using an optimum cutting parameter setting. The results show that the lowest flank wear (~0.4 mm) was achieved using a Titanium Aluminum Nitride-coated tool that was deposited at a high substrate bias (-200 V) and a high nitrogen flow rate (70 sccm). The lowest flank wear was attributed to high coating hardness. AbstrakSifat Mekanik dan Tribologi Lapisan Titanium Aluminium Nitrida pada Perkakas Tungsten Karbida dalam Pemotongan Kering Baja. Telah dilakukan penelitian mengenai pengaruh parameter sputering terhadap sifat mekanik dan tribologi lapisan Titanium Aluminum Nitrida pada perkakas potong tungsten karbida dalam proses pemotongan turning kering baja perkakas. Deposisi lapisan tipis dilakukan menggunakan sistem sputtering magnetron dengan variasi tegangan substrate (-79 s/d -221 Volt) dan laju alir gas nitrogen (30 s/d 72 sccm). Pemotongan turning kering dilakukan menggunakan mesin bubut otomatis CNC dengan parameter pemotongan optimum. Hasil percobaan menunjukan bahwa aus sisi terendah (~0.4 mm) perkakas ditunjukan oleh lapisan Titanium Aluminum Nitrida yang dideposisikan pada tegangan substrat (-200 V) dan laju alir gas nitrogen (70 sccm) tinggi. Rendahnya aus sisi perkakas diakibatkan oleh tingginya nilai kekerasan lapisan.

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Phase transition and properties of Ti–Al–N thin films prepared by r.f.-plasma assisted magnetron sputtering

Cited by 258 publications

References 16 publications

XPS and AFM Investigations of Ti-Al-N Coatings Fabricated Using DC Magnetron Sputtering at Various Nitrogen Flow Rates and Deposition Temperatures

XPS and AFM Investigations of Ti-Al-N Coatings Fabricated Using DC Magnetron Sputtering at Various Nitrogen Flow Rates and Deposition Temperatures

Machining Performance of Sputter-Deposited (Al0.34Cr0.22Nb0.11Si0.11Ti0.22)50N50 High-Entropy Nitride Coatings

The Mechanical and Tribology Properties of Sputtered Titanium Aluminum Nitride Coating on the Tungsten Carbide Insert Tool in the Dry Turning of Tool Steel

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