The anodic oxidation behavior of niobium has been investigated under nearly industrial conditions. High porosity sintered bodies as well as flat niobium sheets were anodized between 20-100 V in 1 wt % aqueous solution of o-phosphoric acid at 65°C, applying current densities between 0.01 and 0.067 mA/cm 2 . During formation at constant current, changes in the rate of voltage increase has been observed. Stopping oxidation at such changes in the V(t) curve, the electrical properties, surface composition and in-depth homogeneity of the oxide was analyzed. The formed oxide layers have also been investigated after a heat-treatment in vacuum and in air. Based on the measured composition profiles, the role of the solid suboxide phases ͓Nb͑O͒, NbO, NbO 2 ] in the oxide growth and in the annealing could be clarified.The Nb/Nb 2 O 5 system is a candidate to replace the widely used Ta/Ta 2 O 5 system in solid electrolyte capacitors in some applications. 1-5 Advantages of the Nb/Nb 2 O 5 system are the high dielectric permittivity 6 ( r Ϸ 42) of Nb 2 O 5 , the relatively low price of niobium, and the vastness of niobium reserves. 7 However, some properties of niobium, like its high oxygen absorbing capacity, 2,8 strong chemical affinity to oxygen, carbon, and nitrogen, 2 as well as the existence of its suboxides, NbO 2 , NbO, and Nb͑O͒ beside the desirable Nb 2 O 5 , makes this system hard to handle. [8][9][10][11]12 Nevertheless, the usage of Nb as anode material is feasible considering the following facts. ͑i͒ The stable working voltage of this system is significantly lower than that of the Ta/Ta 2 O 5 system, 6 because the r value of Nb 2 O 5 is higher. This lower electrical field in the oxide leads to the same ionic current. ͑ii͒ The maximum working temperature of the system is 125°C, which is lower than that of the Ta/Ta 2 O 5 system ͑typically 150°C͒. Therefore, despite the problems mentioned, the Nb/Nb 2 O 5 based capacitors are reliable and stable devices. 13 The anodization of niobium has been widely studied 6,14-18 at the basic research level. This process proved to be basically similar to the anodization of tantalum. The investigation of the effect of heattreatment is important, as it causes changes in the capacity ͑C͒ and leakage current of the capacitors. The thermal stability of the Ta/Ta 2 O 5 system has been widely studied. [19][20][21][22][23][24][25] The capacity of such systems changes after heat-treatment due to the incorporation of O from the oxide into the Ta metal. A change in the structure of the oxide layer was found by X-ray diffraction ͑XRD͒. 21 Smith and Tripp 26 have extended their studies onto the anodically oxidized Nb/Nb 2 O 5 system. The effect of annealing was much more pronounced than in the Ta/Ta 2 O 5 system. The microphysical properties and structure of various niobium oxides are described in detail. 27 Grundner and Halbritter 28 have investigated the heattreatment induced transformation of the chemical structure of various thin film oxides ͑grown both anodically and thermally͒. Like Hahn...