Phase-stepping interferometry: Five-frame algorithm with an arbitrary step

Stoilov, Georgi; Dragostinov, Todor

doi:10.1016/s0143-8166(96)00048-6

Cited by 100 publications

(34 citation statements)

References 10 publications

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“…However, as the authors themselves already mention in their paper, Stoilov and Dragostinov [25], the method only works well for ψ = α = π 2 . In other words, this method is not a specific (class b) or Carré-like method with unknown phase-shift, but rather a class a method like the 5-π 2 -Schwider et al [23] algorithm in (20).…”

Section: Carré (Like) Algorithmsmentioning

confidence: 98%

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Study of the performance of 84 phase-shifting algorithms for interferometry

Buytaert

Dirckx

2011

J Opt

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When performing phase-shifting, phase differences in a periodic intensity profile are changed, and the resulting irradiance distributions are recorded at each step. The wanted phase can be obtained from the arctangent of the ratio between two combinations of the observed irradiances, according to the phase-shifting algorithm (psa) used. There are many such combinations and thus different psas, each with specific performance and properties. We briefly discuss some error sources which might influence the performance and quality of interferometry measurements. The robustness against these error sources is strongly dependent on the psa used. Several computer simulations on all of the 84 psas were carried out to confirm which algorithms perform best in the presence of some straightforward error sources.

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Section: Carré (Like) Algorithmsmentioning

confidence: 98%

“…To end with, another Carré-like algorithm emerged but with n = 5 fringe images. The 5-α-Stoilov and Dragostinov [25] algorithm goes as follows:…”

Section: Carré (Like) Algorithmsmentioning

confidence: 99%

Study of the performance of 84 phase-shifting algorithms for interferometry

Buytaert

Dirckx

2011

J Opt

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“…The phase-stepping algorithm of Soilov and Dragcstinov, 9) which uses an equal step phase with an arbitrary value by changing accurately the position of a PZT, has been widely applied to process the interference patterns. It can not only eliminate the effect of the linear error generated by phase shift but also restrain the second-order nonlinear error.…”

Section: Measuring Principle and Experimentsmentioning

confidence: 99%

Infrared-light interferometry and a phase-stepping algorithm for measuring the three-dimensional topography of components covered with GaAs or Si

Chou

Niu

Liu

et al. 2012

OPT REV

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“…According to (1), by Stoilov's arbitrary step fiveframe algorithm [12] , the position of zero-th order fringe can be determined when envelope function achieves its maximum by the following iterative computation [8,12] :…”

Section: Approach and Apparatusmentioning

confidence: 99%

A high precision profilometer based on vertical scanning microscopic interferometry

Dai

Xie

Gong

et al. 2008

J. Shanghai Univ.(Engl. Ed.)

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A profilometer used for 3 dimension measurement of micro-surface topography is presented. The instrument is based on the vertical scanning microscopic interferometry (VSMI). A Linnik type interference microscope is used and the interferograms which present changes of surface profile are recorded with a CCD camera. A developed nano-positioning work stage with an integrated optical grating displacement measuring system realizes the precise vertical scanning motion during profile measurement. By a white-light phase shifting algorithm of arbitrary step, frames of interferograms are processed by a computer to rebuild and evaluate the measured profile. Because of the specialty of VSMI, the profilometer is suitable for both smooth and rough surface measurement. It can also be used to measure curved surfaces, dimension of micro electro mechanical systems (MEMS), etc. The vertical resolution of the profilometer is 0.5 nm, and lateral resolution 0.5 μm.

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Phase-stepping interferometry: Five-frame algorithm with an arbitrary step

Cited by 100 publications

References 10 publications

Study of the performance of 84 phase-shifting algorithms for interferometry

Study of the performance of 84 phase-shifting algorithms for interferometry

Infrared-light interferometry and a phase-stepping algorithm for measuring the three-dimensional topography of components covered with GaAs or Si

A high precision profilometer based on vertical scanning microscopic interferometry

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