cascade Microtech probe station using ACP-40 CPW probes by Cascade and 40 Å GSG Picoprobes by GGB Industries. An Agilent 8510C network analyzer is used for the S-parameter measurements between 500 MHz and 4 GHz.The capacitance C and quality factor Q are computed using the complex input impedance (Z ϭ r Ϫ jX C ϭ r Ϫ j/C), C ϭ 1/X C , and Q ϭ X C /r. The Q is used to characterize the losses in the lumped circuit. Q can be defined as the ratio of stored energy to the average energy dissipated in the system per cycle. For any type of passive circuits represented by admittance or impedance, this relation can be defined accordingly. Therefore, Figure 5 shows the capacitance values of measurement data for the BST IDC as a function of frequency for various applied voltages.As shown in Figure 5, as the frequency increases, the capacitance decreases, which is proportional to exponential function of frequency. The capacitance values for undoped BST IDC and 3% Mn-doped BST IDC are found to be about 5-1.6 pF and 4.5-1.4 pF, respectively, at the bias voltage of 0 V. Additionally, at the bias voltage of 20 V, the capacitance values are obtained by about 3.6 -1.3 pF and 3.1-1.0 pF for each BST interdigital capacitor, respectively.The measured Q and C as a function of the frequency at 3.5 GHz and applied DC voltage is shown in Figure 6. From the figure, the values of Q vary from about 9.25 (0 V) to 11.1 (20 V) for the undoped BST IDC and from about 10.71 (0 V) to 11.44 (20 V) for the Mn-doped BST IDC. Also, C varies from about 1.608 pF (0 V) to 1.422 pF (20 V) for the undoped BST IDC and from about 1.422 pF (0 V) to 1.032 pF (20 V) for the Mn-doped BST IDC. Tunability is 11.6%, and 27.4%, respectively.
CONCLUSIONA BST tunable capacitor within an interdigital structure with high tunability and low-loss tangent has been successfully demonstrated. The 3% Mn-doped BST interdigital capacitor exhibits a 27.4% better tuning performance at 3.5 GHz and a 20% better loss-tangent characteristic, as compared with the undoped BST thin-film capacitor. This BST IDC can be used in microwave tunable devices.