2022
DOI: 10.1364/ome.452404
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Phase modulators in hybrid silicon and lithium niobate thin films

Abstract: The hybridization of mono-crystalline silicon and lithium niobate thin films (Si-LNOI) can combine the physical properties of Si and the optical properties of LN, and it has emerged as a new material platform for integrated photonics. In this paper, phase modulators in Si-LNOI were demonstrated. First, the phase modulator was designed. According to the simulation, the Si loading strip waveguide had a small mode area due to the large refractive index of Si. This allowed a small electrode gap that resulted in en… Show more

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Cited by 7 publications
(4 citation statements)
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“…Ultimately, the design of a waveguide with higher optical power confinement and compact mode area will lead to a more significant overlap factor (i.e. electrostatic and optical field overlapping), thereby reducing the half-wave voltage (V π ) [27]. Figure 5 shows the relationship between the effective mode area of TE 0 and TM 0 with W SRN for different R values.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…Ultimately, the design of a waveguide with higher optical power confinement and compact mode area will lead to a more significant overlap factor (i.e. electrostatic and optical field overlapping), thereby reducing the half-wave voltage (V π ) [27]. Figure 5 shows the relationship between the effective mode area of TE 0 and TM 0 with W SRN for different R values.…”
Section: Resultsmentioning
confidence: 99%
“…a larger footprint. In addition, a hybrid Si-LNOI platform was reported with low half-wave voltage and better optical power confinement [27]. Nevertheless, the high propagation loss (42 dB cm −1 ) of Si-LN waveguide remains a challenging issue [28].…”
Section: Introductionmentioning
confidence: 99%
“…Table 1 and 2 summarize the progress of different TFLN modulators with the MZI structure. [ 5,6,12,15,26–107 ] Figure summarizes the half‐wave voltage, device length, and bandwidth of etched and non‐etched TFLN modulators. Both these two kinds of modulators can realize a very high bandwidth.…”
Section: Mzi‐based Tfln Modulatormentioning
confidence: 99%
“…In recent years, more and more reports based on hybrid silicon-LNOI platform have appeared thanks to advances in manufacturing technology 24 29 This platform has great potential for its combining excellent characteristics of two materials: the widespread application of silicon in integrated circuits and its mature preparation and processing technologies, and the unique advantages of lithium niobate among optical materials. Unlike the hybrid silicon nitride-LNOI platform, the larger refractive index difference between silicon and lithium niobate allows light to be stably confined in the high-refractive-index material, which is silicon.…”
Section: Introductionmentioning
confidence: 99%