1994
DOI: 10.1364/ao.33.004147
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Phase-measuring interferometry: new methods and error analysis

Abstract: New methods that can be used to determine phase in phase-stepping interferometry are presented. It is shown that a combination of some of these methods can be used to reduce the error introduced by phase-stepper miscalibration and nonlinearity. Moreover these new algorithms can also be used to detect the presence of miscalibration or phase-shifter nonlinearity. A simplified approach to understanding the error introduced by miscalibration and nonlinearity of the phase stepper and its reduction in phase-shifting… Show more

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Cited by 88 publications
(53 citation statements)
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“…An overview of possible algorithms for phase computation from interferograms was presented in Ref. 9 in the context of phase measurement interferometry.…”
Section: Related Workmentioning
confidence: 99%
“…An overview of possible algorithms for phase computation from interferograms was presented in Ref. 9 in the context of phase measurement interferometry.…”
Section: Related Workmentioning
confidence: 99%
“…͑3͒-͑6͔͒, to emphasize the presence of the phase step error, two four-frame algorithms using the frame sequences ͑1,3,4,5͒ and ͑1,2,3,5͒ were added. 24 These algorithms are characterized by several times increased sensitivity with respect to the phase step error when calculating the interferogram phase distribution. The algorithms describing the intensity modulation distribution using the frames ͑1,3,4,5͒ and ͑1,2,3,5͒, denoted by 4N1 mod and 4N2 mod , are as follows:…”
Section: Interferogram Intensity Modulation Calculationmentioning
confidence: 99%
“…[8][9][10][11][12] However, the phase values obtained by these methods are lying in the range of Ϫ to . For recovering the object shape, absolute phase values ͑e.g., not restricted in the range of Ϫ to ͒ must be analyzed.…”
Section: Introductionmentioning
confidence: 99%