Coherence scanning interferometry (CSI) is also known as white-light interferometry (WLI) and vertical scanning interferometry (VSI). It is a non-contact three-dimensional surface measurement technique that provides an accuracy of up to nanometer level and a measurement range of up to a few hundred micrometers. The principle of coherence scanning interferometry can be briefly summarized as follows: First, the light from a single source is split and channeled into the two arms of interferometer, where the test sample is placed at the end of one arm and a reference mirror is placed at the accuracy of this model is benchmarked against computationally intensive counterparts and verified by experiments. 2. The investigation of the spectral properties of high power phosphor-based white LED and their effects in coherence scanning interferometry. We showed that phosphorbased white LED degrades the performance of coherence scanning interferometry. 1.4. Organization of the report The rest of this thesis is organized as follows: not compensated. As such, we propose a method to compensate the spectral effects. Other than these, we also present a theoretical explanation of the distinctive feature which can be used to predict and manipulate the interference signal (and its fringe contrast function) by spectral manipulation. Chapter 5 presents an implementation study where the spectral effects of phosphor-based white LED are harnessed, instead of being compensated, to improve the performance of a phase-based height reconstruction algorithm. We analyze how the phase-based reconstruction algorithm takes advantages of the spectral property of phosphor-based white