2014
DOI: 10.1364/oe.22.015804
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Perspectives of mid-infrared optical coherence tomography for inspection and micrometrology of industrial ceramics

Abstract: Optical coherence tomography (OCT) is a promising tool for detecting micro channels, metal prints, defects and delaminations embedded in alumina and zirconia ceramic layers at hundreds of micrometers beneath surfaces. The effect of surface roughness and scattering of probing radiation within sample on OCT inspection is analyzed from the experimental and simulated OCT images of the ceramic samples with varying surface roughnesses and operating wavelengths. By Monte Carlo simulations of the OCT images in the mid… Show more

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Cited by 111 publications
(56 citation statements)
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“…Together with the high beam quality and intensity of a fiber-delivered beam SCG in chalcogenide fibers has opened the prospects for new powerful MIR analytical tools for broadband fundamental vibrational spectroscopy [6], optical coherence tomography [7], and hyperspectral microscopy [8,9]. Currently, the most mature MIR fiber SC technology is based on fluoride glasses, such as ZrF 4 -BaF 2 -LaF 3 -AlF 3 -NaF (ZBLAN), owing to their high-power capabilities and excellent transmission from the UV to about 4.5 µm [10,11].…”
Section: Introductionmentioning
confidence: 99%
“…Together with the high beam quality and intensity of a fiber-delivered beam SCG in chalcogenide fibers has opened the prospects for new powerful MIR analytical tools for broadband fundamental vibrational spectroscopy [6], optical coherence tomography [7], and hyperspectral microscopy [8,9]. Currently, the most mature MIR fiber SC technology is based on fluoride glasses, such as ZrF 4 -BaF 2 -LaF 3 -AlF 3 -NaF (ZBLAN), owing to their high-power capabilities and excellent transmission from the UV to about 4.5 µm [10,11].…”
Section: Introductionmentioning
confidence: 99%
“…Points indicate the experimental data; solid curves show the cosine fitting of the data according to equation (4). Note that modulation period is given by the wavelength of idler photons.…”
Section: Measurements Of Positions Of Reflective Layersmentioning
confidence: 99%
“…They have a designed depth of 65 μm and widths varying from 140 to 290 μm. These microchannels are covered by a zirconia layer and this geometry mimics a double layer stack with embedded channels [4]. Then they are positioned under the OCT probe to get volumetric data at the imaging sites, 1 and 2, as marked in Fig.…”
Section: B Ceramic Samplesmentioning
confidence: 99%
“…A potential application of OCT is quality inspection and micrometrology of embedded structures in multilayered ceramic materials [3,4]. This is highly demanded in, e.g., advanced "roll-to-roll" multimaterial-layered 3D shaping technology for manufacturing of multifunctional micro devices with complex 3D structures [5].…”
Section: Introductionmentioning
confidence: 99%