A combined set of experimental and theoretical diffraction studies are performed to evaluate the possible impact of stacking faults on magnetic anisotropy using epitaxially grown Co/Ru and Co 84 Pt 16 /Ru thin films on MgO(111) single crystal substrates. A 3rd nearest neighbor interaction is incorporated into Monte Carlo simulations of faulted film growth used to predict (10.L) diffraction profiles. These are compared with experimental profiles to determine stacking fault content. It is found that stacking fault density decreases with increasing temperature concurrent with an increase in magnetic anisotropy and a compression of the crystallographic lattice parameter,