Perovskite Solar Cells with All Functional Layers Deposited by Magnetron Sputtering

Abstract

Exploring deposition techniques suitable for industrial production is an important development direction for perovskite solar cells (PSCs). Magnetron sputtering is one of the most welldeveloped vapor deposition techniques in the electronics industry, with advantages such as wide material selection, uniform and dense film formation, and a fast deposition speed. All functional layers of PSCs can be deposited with magnetron sputtering. Replacing the organic charge transport layer (CTL) with a sputtered inorganic CTL can also reduce cost and improve stability. However, due to the working principle of momentum exchange in magnetron sputtering, the deposited particles have an extremely high kinetic energy. It will damage the soft lattice perovskite material if the deposition process is continued upon the perovskite layer. In this work, devices with a structure of FTO/NiO x /perovskite/SnO 2 /Ag were prepared by magnetron sputtering. A mixed sputtering buffer layer of PMMA and PCBM was coated on top of the perovskite layer to prevent the damage caused by further-deposited SnO 2 while ensuring good charge transport. Finally, the power conversion efficiency (PCE) of the PSCs based on solution-deposited perovskite reached 17.43%, and the PCE of PSCs with all functional layers (including perovskite layers) deposited by magnetron sputtering reached 14.62%. Thanks to the dense and stable inorganic CTL, the device exhibited excellent long-term stability, maintaining 93.5% of its initial PCE after being placed in a nitrogen box for 2000 h. This work, for the first time, achieved magnetron sputtering deposition of all functional layers for PSCs. This new fabrication process offers a new path for the industrialization of PSCs.

Recent Advancements in Enhancing Interfacial Charge Transport for Perovskite Solar Cells

“…From a commercial development perspective, Peng et al [113] introduced a magnetron sputtering deposition technique for the fabrication of all layers in a PSC. By employing a mixed sputtering buffer layer composed of PMMA and PCBM atop the perovskite layer, they successfully prevented damage to the perovskite film during the subsequent deposition of the SnO 2 ETL, as shown in Figure 5b.…”

“…Reproduced with permission. [113] Copyright 2023, the American Chemical Society. c) Schematic illustration of the device structure of the PSCs, including the formation of EPN on the SnO 2 layer.…”

Solvent-free preparation and thermocompression self-assembly: an exploration of performance improvement strategies for perovskite solar cells

“…Therefore, the use of magnetron sputtering for all functional layers can promote the commercialization of PSCs. 22 Perovskite lms prepared by magnetron sputtering exhibit enhanced properties, and PSCs fabricated on FTO-coated glass surfaces have promising commercial and industrial applications. 47,48 Another important issue is transitioning high-PCE PSC technology from laboratory-scale preparation to commercialscale high-throughput production with minimal PCE loss.…”

“…21 Peng et al prepared uorine-doped tin oxide (FTO)/NiO x /perovskite/SnO 2 /Ag devices by magnetron sputtering and achieved the magnetron-sputtering deposition of all the functional layers of a PSC for the rst time. 22 Both magnetron sputtering of the perovskite layer and continuous deposition on the perovskite layer destroy the so lattice of the perovskite. 23 A breakthrough in high-quality perovskite deposition via magnetron sputtering was achieved by post-treatment with methyl amine gas.…”

“…23,24 Furthermore, to prevent potential damage caused by further deposition of SnO 2 , a mixed sputtering buffer layer of polymethacrylate (PMMA) and phenyl-C 61 -butyric acid methyl ester (PCBM) was deposited on the perovskite layer. 22 This lm protects the delicate lattice structure of the perovskite and ensures efficient charge transfer within the nal cell.…”