2009
DOI: 10.1016/j.tsf.2008.11.089
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Permeation barrier properties of thin oxide films on flexible polymer substrates

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Cited by 170 publications
(96 citation statements)
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“…To enhance the durability of thermochromic VO 2 films, bilayer coatings as VO 2 /TiO 2 /ZnO, VO 2 /SiO 2 / ZnO, and VO 2 /SiO 2 /TiO 2 have been studied [88]. In this study, VO 2 films with TiO 2 /ZnO protective coatings have been demonstrated higher antioxidant activity under aging tests, which can be attributed to the different oxygen permeability through different inorganic films [89]. Zhan et al [90] fabricated a complicated multilayer structure of SiN x / NiCrO x /SiN x /VO x /SiN x /NiCrO x /SiN x , which exhibits enhanced thermal stability up to 375°C.…”
Section: Protective Layers For Vo 2 Filmsmentioning
confidence: 85%
“…To enhance the durability of thermochromic VO 2 films, bilayer coatings as VO 2 /TiO 2 /ZnO, VO 2 /SiO 2 / ZnO, and VO 2 /SiO 2 /TiO 2 have been studied [88]. In this study, VO 2 films with TiO 2 /ZnO protective coatings have been demonstrated higher antioxidant activity under aging tests, which can be attributed to the different oxygen permeability through different inorganic films [89]. Zhan et al [90] fabricated a complicated multilayer structure of SiN x / NiCrO x /SiN x /VO x /SiN x /NiCrO x /SiN x , which exhibits enhanced thermal stability up to 375°C.…”
Section: Protective Layers For Vo 2 Filmsmentioning
confidence: 85%
“…Nowadays, types of metal oxides and nitrides, as well as carbons, are known to be possible to function as gas barrier thin films [23]. Carbon and silicate oxide thin films are, however, only two thin film materials available for mass production technologies for gas barrier enhanced PET bottles.…”
Section: Current Methodology To Thin Film Formation Onto Pet Bottle Smentioning
confidence: 99%
“…Those can even be applied as a very thin layer but with the loss of optical transparency as a disadvantage [6,7]. Suitable candidates for transparent layers are for instance AlO x , Al 2 O 3 , SiO x , TiO x , SiN x , Si 3 N 4 , SiON, and ZnO, whose application requires vacuum processes (physical vapor deposition (PVD)/chemical vapor deposition (CVD)/atomic layer deposition (ALD)) in general [8]. At least, ultra high barriers with the aimed values for the protection of plastic electronics can be obtained by using those inorganic layers in an alternating inorganic-organic multilayer setup [9][10][11].…”
Section: Introductionmentioning
confidence: 99%