2014
DOI: 10.3379/msjmag.1404r003
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Permeability Measurements of Magnetic Thin Film with Microstrip Probe

Abstract: A highly sensitive and broadband method of obtaining thin f lm permeability without sample-size limitations was developed based on the change in high-frequency impedance due to the skin effect. A microstrip probe with impedance matching of 50 Ω was fabricated, and placed in proximity to a magnetic thin film. The permeability was optimized with the Newton-Raphson method. The permeability of CoFeB f lm (45 mm 25 mm and 0.5 m in thickness) and that of FeCoB/Ru film (50 mm 40 mm and 0.2 m in thickness) were eval… Show more

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Cited by 14 publications
(7 citation statements)
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“…To evaluate the permeability of thin films, the most common method is that the sample is inserted into the microwave fixture or contacts the microwave board because of the limitation of the testing mechanism. [25,[70][71][72][73][74][75]77,78] Thus, only several techniques have been developed for measuring the hightemperature permeability of magnetic thin films. [7,77] They will be described below.…”
Section: Coplanar Waveguide Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…To evaluate the permeability of thin films, the most common method is that the sample is inserted into the microwave fixture or contacts the microwave board because of the limitation of the testing mechanism. [25,[70][71][72][73][74][75]77,78] Thus, only several techniques have been developed for measuring the hightemperature permeability of magnetic thin films. [7,77] They will be described below.…”
Section: Coplanar Waveguide Methodsmentioning
confidence: 99%
“…The testing principle of the device is based on standard single-coil perturbation technique. [28,80] The variation of permeability spectrum of ferromagnetic layer with ferromagnetic layer impedance is calculated by an RLC model. In this work, the high-frequency permeability spectra of CoNbZr films at different temperatures (90 K ∼ 390 K) and different frequencies (500 MHz ∼ 6 GHz) are measured as shown in Fig.…”
Section: Shorted Microstrip Transmission-line Methodsmentioning
confidence: 99%
“…3 Photo of the MSL probe. This probe has a narrow microstrip line (0.36 mm wide (left) 16) and 1.2 mm wide (right) 22) ) and copper block as return pass. These values are calculated using FEM along the center line "y" of the specimen.…”
Section: Analysis and Experimentsmentioning
confidence: 99%
“…For static magnetic property measurements, a vibrating sample magnetometer (VSM) and a superconducting quantum interference device (SQUID) are two common magnetometers used for investigation of the temperature dependence of the static magnetic properties of magnetic thin films [7,8]. For dynamic magnetic properties measurements, especially for the frequency domain permeability spectra for magnetic thin films, due to the measurement mechanism, the commonest method for evaluating the permeability of thin films requires that the sample be inserted into the microwave fixture or be in contact with the microwave board [9][10][11][12][13][14][15][16][17]. Thus, only several techniques have been developed for high-temperature permeability measurements of magnetic thin films [18,19].…”
Section: Introductionmentioning
confidence: 99%