Permeability Enhancement by Multilayer Ferromagnetic Composites for Magnetic-Core On-Chip Inductors

Shah, Umer; Liljeholm, Jessica; Ebefors, Thorbjörn; Oberhammer, J.

doi:10.1109/lmwc.2014.2341037

Cited by 7 publications

(4 citation statements)

References 9 publications

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“…The extracted RF material properties (µ´, ε and self resonance frequency) are presented in detail elsewhere in [7]. …”

Section: Concept and Designmentioning

confidence: 99%

“…al [7] was to increase the thickness of the ferromagnetic material without increasing its conductivity, by using an unpatterned ferromagnetic NiFe/AlN sandwich structure as magnetic core material. This article is a continuation and will further focus on the fabrication and integration challenges with magnetic material, when aimed at integration with thin wafer used for Silex 3D RF TSV inductors, illustrated in Figure 1 c), to further improve the inductor performance.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Multilayer ferromagnetic composites enabling on-chip magnetic-core inductors beyond 1 GHZ

Liljeholm

Ebefors

Rohrmann

et al. 2015

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

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This paper report of fabricated unpatterned ferromagnetic NiFe/AlN multilayer composites and an established process flow for magnetic core material suitable for integration with Silex 3D RF TSV technology. The fabricated single-loop test inductors achieved an inductance enhancement of 4.8 and a quality factor enhancement of 4.5 at 400 MHz. Simulations show that magnetic material in connection with 3D TSV inductors result in an inductance enhancement up to a factor of 5 at GHz frequencies for the same inductor area, or the same inductance can be achieved at 9 times smaller area and cost.

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“…The extracted RF material properties (µ´, ε and self resonance frequency) are presented in detail elsewhere in [7]. …”

Section: Concept and Designmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Multilayer ferromagnetic composites enabling on-chip magnetic-core inductors beyond 1 GHZ

Liljeholm

Ebefors

Rohrmann

et al. 2015

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

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“…As a result, the society urgently needs electromagnetic wave (EMW) absorbing materials with light weight, thin thickness, wide effective absorbing band width, and strong absorption capacity [ 1 , 2 , 3 , 4 ]. These absorbers include polymer composites with low conductive nanoparticles [ 5 , 6 ], polymer composites with metallic nanoparticles [ 7 ], composites containing glass coated microwires [ 8 , 9 ], thin film based composites [ 10 , 11 ], magnetic cellulose [ 12 ], and magnetic wood [ 4 , 13 ].…”

Section: Introductionmentioning

confidence: 99%

Synthesis of Magnetic Wood Fiber Board and Corresponding Multi-Layer Magnetic Composite Board, with Electromagnetic Wave Absorbing Properties

et al. 2018

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With the rapid growth in the use of wireless electronic devices, society urgently needs electromagnetic wave (EMW) absorbing material with light weight, thin thickness, wide effective absorbing band width, and strong absorption capacity. Herein, the multi-layer magnetic composite boards are fabricated by hot-pressing magnetic fiber boards and normal veneer layer-by-layer. The magnetic fibers obtained using in-situ chemical co-precipitation are used to fabricate magnetic fiber board by hot-pressing. The magnetic wave absorbing capacities of the magnetic fiber boards obtained with 72 h impregnation time exhibit strongest adsorption capacities of −51.01 dB with a thickness of 3.00 mm. It is proved that this outstanding EMW absorption property is due to the strongest dielectric loss, the optimal magnetic loss, and the dipole relaxation polarization. Meanwhile, the EMW absorbing capacities of the corresponding multi-layer composite magnetic board increases from −14.14 dB (3-layer) to −60.16 dB (7-layer). This is due to the generated multi-interfaces between magnetic fiber board and natural wood veneer in the EMW propagation direction, which significantly benefit multireflection and attenuation of the incident waves. The results obtained in this work indicate that natural wood fibers are of great potential in the fabrication of magnetic multi-layer boards treated as EMW absorbers via a low cost, green, and scalable method.

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“…5 20 soft magnetic alloys with different interlayer materials, interlayer thickness, total film thickness, process parameters and angular distribution of the sputtered material. More specifically, we deposit these films on 8" bare Si wafers and Si/200nm-thermal-SiO 2 wafers in the high-throughput Evatec LLS-EVO-II sputter system.…”

Section: Introductionmentioning

confidence: 99%

Tailoring the soft magnetic properties of sputtered multilayers by microstructure engineering for high frequency applications

Falub¹,

Rohrmann²,

Bless³

et al. 2017

AIP Advances

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Innovative soft magnetic multilayers with enhanced in-plane anisotropy and ferromagnetic resonance frequency for integrated RF passive devices AIP Advances 8, 048002 (2018) dielectric interlayers were deposited on 8" Si wafers using DC, pulsed DC and RF cathodes in the industrial, high-throughput Evatec LLS-EVO-II magnetron sputtering system. A typical multilayer consists of a bilayer stack up to 50 periods, with alternating (50-100) nm thick magnetic layers and (2-20) nm thick dielectric interlayers. We introduced the in-plane magnetic anisotropy in these films during sputtering by a combination of a linear magnetic field, seed layer texturing by means of linear collimators, and the oblique incidence inherent to the geometry of the sputter system. Depending on the magnetic material, the anisotropy field for these films was tuned in the range of ∼(7-120) Oe by choosing the appropriate interlayer thickness, the aspect ratios of the linear collimators in front of the targets, and the sputter process parameters (e.g. pressure, power, DC pulse frequency), while the coercivity was kept low, ∼(0.05-0.9) Oe. The alignment of the easy axis (EA) on the 8" wafers was typically between ±1.5 • and ±4 • . We discuss the interdependence of structure and magnetic properties in these films, as revealed by atomic force microscopy (AFM), X-ray reflectivity (XRR) with reciprocal space mapping (RSM) and magneto-optical Kerr effect (MOKE) measurements. © 2017 Author (s)

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Permeability Enhancement by Multilayer Ferromagnetic Composites for Magnetic-Core On-Chip Inductors

Cited by 7 publications

References 9 publications

Multilayer ferromagnetic composites enabling on-chip magnetic-core inductors beyond 1 GHZ

Multilayer ferromagnetic composites enabling on-chip magnetic-core inductors beyond 1 GHZ

Synthesis of Magnetic Wood Fiber Board and Corresponding Multi-Layer Magnetic Composite Board, with Electromagnetic Wave Absorbing Properties

Tailoring the soft magnetic properties of sputtered multilayers by microstructure engineering for high frequency applications

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