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2017
DOI: 10.1504/ijnt.2017.082435
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Periodic upright nanopyramid fabricated by ultraviolet curable nanoimprint lithography for thin film solar cells

Abstract: In this work, a periodic upright nanopyramid structure was developed for light harvesting applications suitable for thin film solar cells. The periodic inverted nanopyramid structure was fabricated on Si substrate by laser interference lithography (LIL) and subsequent pattern transfer by combined reactive ion etching and KOH wet etching. The silicon substrate was used as a master mould in the replication process utilising ultraviolet curable nanoimprint lithography (UV-NIL) process. The inverted nanopyramid pa… Show more

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Cited by 9 publications
(10 citation statements)
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“…A variety of nanophotonic structures, such as nanocones [51,52,53,54], nanorods [55,56,57], nanopillars [58,59,60], nanowells [61,62,63], nanopyramids [64,65,66,67,68,69,70], and nanospheres [71,72], have been extensively studied for enhancing the performance of the solar cells. The photonic nanostructures themselves can be dielectric, metallic, or the absorber layer itself [71,73,74].…”
Section: Photonic Nanostructuresmentioning
confidence: 99%
“…A variety of nanophotonic structures, such as nanocones [51,52,53,54], nanorods [55,56,57], nanopillars [58,59,60], nanowells [61,62,63], nanopyramids [64,65,66,67,68,69,70], and nanospheres [71,72], have been extensively studied for enhancing the performance of the solar cells. The photonic nanostructures themselves can be dielectric, metallic, or the absorber layer itself [71,73,74].…”
Section: Photonic Nanostructuresmentioning
confidence: 99%
“…Details of the fabrication process of the master mold are described in Ref. [9]. A UV curable resist (OrmoStamp) was spincoated onto a glass substrate and afterward the substrate was placed over the Si mold with the inverted nanopyramids inside the imprint tool.…”
Section: Upright Nanopyramid Structured Cover Glass For Solar Cells 2mentioning
confidence: 99%
“…Details on the fabrication process of the master mold are described in Ref. [9]. The upright nanopyramid patterns were successfully replicated from the Si mold onto the glass substrate using UV nanoimprint process resulting in high fidelity as described in Section 2.1.…”
Section: Surface Wettability and Self-cleaning Behaviorsmentioning
confidence: 99%
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“…In the last few decades, nanostructure applications have attracted increasing interest in many fields ranging from nanoscale electronics to bionanotechnologies [1][2][3][4]. Nanostructures can be fabricated by several techniques including electron beam lithography (EBL) [5], laser interference lithography (LIL) [6], focused ion beam lithography (FIB) [7], nanosphere lithography (NSL) [8], block copolymer lithography (BCPL) [9], and nanoimprint lithography (NIL) [10,11].…”
Section: Introductionmentioning
confidence: 99%