2009
DOI: 10.1002/smll.200800923
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Periodic Large‐Area Metallic Split‐Ring Resonator Metamaterial Fabrication Based on Shadow Nanosphere Lithography

Abstract: A fast and cheap, large-area (>1 cm(2)), high-coverage fabrication technique for periodic metallic split-ring resonator metamaterials is presented, which allows control of inner- and outer-ring diameters, gap angles, as well as thickness and periodicity. This method, based on shadow nanosphere lithography, uses tilted-angle-rotation thermal evaporation onto Langmuir-Blodgett-type monolayers of close-packed polystyrene nanospheres. Excellent agreement of the process parameters with a simplified model is demonst… Show more

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Cited by 164 publications
(134 citation statements)
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“…Arrays nanoscale crescents [136,252] can be constructed using nonclose-packed monolayers, the preparation of which has been introduced in chapter 5.2.2. Such objects are of special interest as they support several multipolar resonances [129][130]148] and can be described as nanoscale split ring resonators.…”
Section: Introductionmentioning
confidence: 99%
“…Arrays nanoscale crescents [136,252] can be constructed using nonclose-packed monolayers, the preparation of which has been introduced in chapter 5.2.2. Such objects are of special interest as they support several multipolar resonances [129][130]148] and can be described as nanoscale split ring resonators.…”
Section: Introductionmentioning
confidence: 99%
“…Kirakosian et al(Kirakosian et al, 2001) who demonstrated an atom-accurate silicon grating with period 5.73 nm, or exactly 17 atoms, by means of a Si(577) surface: notice that a grating of parallel lines is one of the most frequent test for patterning methods and an insidious one for lithography, since chemical etching suffers from capillarity when it comes to penetrating nanometer-narrow channels. Finally, the self-assembly properties of monodisperse spheres were also exploited to demonstrate shadow nanosphere lithography (NSL) that allow the fabrication of periodic arrays with morphologies ranging from cups to rods and wires by simply changing the substrate position with respect to the evaporation source (Kosiorek et al, 2005;Imperia et al, 2008;Gwinner et al, 2009). …”
Section: Other Patterning Methods Based On Self Assemblymentioning
confidence: 99%
“…Applications such as optical filters, [120,121] substrates for surface-enhanced Raman spectroscopy, [8,123] and metamaterials [128,130,133,137] required two-dimensional arrays of nanostructures. Using a procedure that combined replica molding of a nanostructured template (for example, a set of nanorods) in epoxy by soft lithography, thin-film deposition of metal onto those rods, embedding, and sectioning parallel to the plane supporting the nanorods, we produced two-dimensional arrays of nanostructures using nanoskiving.…”
Section: Fabrication Of 2d Arrays Of Nanostructuresmentioning
confidence: 99%
“…[66,135] Nanosphere lithography, pioneered by Van Duyne and coworkers, uses self-assembled spheres as a stencil mask, in which the void spaces between the spheres direct the deposition of metal on the substrate by evaporation. [136,137] Rogers, Odom, Nuzzo, and coworkers have used soft lithographic techniques, such as patterning photoresists with conformal phase-shifting masks, [138] as well as soft nanoimprint lithography, [139] to form arrays of nanoholes in metallic films [140] and pyramidal shells. [141] This section describes the use of nanoskiving to generate nanostructures for a variety of optical applications.…”
Section: Introductionmentioning
confidence: 99%