Performances of interferometric optical transmission diagnostic for in situ and real-time control of magnetron sputtering deposition process

Perry, F.; Billard, Alain; Pigeat, P.

doi:10.1016/j.measurement.2007.06.003

Cited by 7 publications

(7 citation statements)

References 12 publications

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“…Films of different thicknesses were deposited by varying the deposition time. The thicknesses of the coatings were determined by analysing the transmittance-wavelength curves measured with a Varian Cary 5000 optical spectrometer thanks to a programme developed by PVDco Ltd. [21,22] using a similar layer deposited on a glass substrate. Before depositing the Pd layers by PVD on one side of the electrolyte, gold counter and reference electrodes were deposited on the opposite side of the pellet from a gold paste (Metalor A1644) annealed at 800°C under air for 2 h. The catalytic activity measurements for the DOM were carried out at atmospheric pressure in a specific quartz reactor described elsewhere [23].…”

Section: Methodsmentioning

confidence: 99%

Electrochemical promotion of deep oxidation of methane on Pd/YSZ

et al. 2008

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Electrochemical catalysts based on Pd deposited by Physical Vapour Deposition on YSZ were used for methane deep oxidation. Different thicknesses of Pd films varying from 11 to 75 nm were catalytically characterized between 150 and 750°C. The Pd loadings were extremely low. Catalytic and EPOC experiments were carried out on those electrochemical catalysts. Their catalytic activities were compared with the performances of a reference catalyst. It was found that the catalytic activity can be in situ tuned by applying an anodic polarization thus supplying oxygen ions at the surface of the catalyst. Faradaic efficiency values up to 258 were observed and the induced modifications of the catalytic rate were typically 100 times higher than the corresponding ionic current. The influence of the polarization on the temperature of decomposition of the palladium oxide was also examined. The polarization was found to enhance the thermal stability of the oxide and turn palladium oxide into metallic palladium at higher temperatures.

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Section: Methodsmentioning

confidence: 99%

Electrochemical promotion of deep oxidation of methane on Pd/YSZ

et al. 2008

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“…Coating thickness was also determined ex-situ by optical transmittance measurements performed with a UV-visible-NIR Spectrophotometer (UV3600, produced by Shimadzu) using a principle described in [7]. The transmittance curves were fitted by Scout software developed by W. Theiss.…”

Section: Structural and Morphological Characterisationmentioning

confidence: 99%

Influence of the Bias Substrate Power on the GDC Buffer Layer

et al. 2017

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Gadolinia Doped Ceria (GDC) buffer layers were synthesized by reactive magnetron sputtering under different bias powers applied to the substrate holder. All as-deposited coating present a face centered cubic (f.c.c) structure of ceria with dense and adhesive morphology. Only the film deposited under 80 W bias power applied to the substrate does not exhibit cracks after an annealing treatment during 2 h under air at 1000°C. The performance of the cell is 670 mW.cm -2 @ 800 mA.cm -2 at 790°C and no degradation was observed after 150 hours.

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“…Total pressure was measured using an absolute MKS Baratron pressure gauge. Coating thickness was measured by analysing the transmittance-wavelength curves measured with a Varian Cary 5000 optical spectrometer based on a programme developed by PVDco Ltd [28,29]. The electrochemical catalyst consisted of a dense and continuous thin Pt film (geometric area of 1.5 cm 2 , Pt loading of 65 lg cm -2 ) deposited on one side of the YSZ disc (17 mm in diameter and 0.5 mm thick).…”

Section: Electrochemical Catalyst Preparationmentioning

confidence: 99%

Towards a new definition of EPOC parameters for anionic electrochemical catalysts: case of propene combustion

et al. 2008

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The electrochemical promotion of catalysis (EPOC) of propene combustion was investigated using Pt sputtered thin film on an O 2-conductor, 8 mol% Y 2 O 3 -stabilized-ZrO 2 (YSZ). In order to separate the influence of the thermal migration of the O 2-oxide ions from the electrolyte to the catalyst surface and the impact of an electrical polarization on the catalytic activity, several lightoff experiments (cool down and heat up procedures) were successively performed under different polarizations, i.e. OCV, +2 and -2 V. These experiments have clearly shown that the presence of O 2-(thermally or electrochemically induced) inhibits the catalytic activity of the platinum for the propene deep oxidation. These results demonstrate the importance to define a normalized rate enhancement ratio, q n , from a reference value of the catalytic rate corresponding to a Pt surface state free of O 2-ions.

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Performances of interferometric optical transmission diagnostic for in situ and real-time control of magnetron sputtering deposition process

Cited by 7 publications

References 12 publications

Electrochemical promotion of deep oxidation of methane on Pd/YSZ

Electrochemical promotion of deep oxidation of methane on Pd/YSZ

Influence of the Bias Substrate Power on the GDC Buffer Layer

Towards a new definition of EPOC parameters for anionic electrochemical catalysts: case of propene combustion

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