Performance Trends of on-Chip Spiral Inductors for Rfics

Abstract

Abstract-Performance trends varying with different geometrical parameters for on-chip spiral inductors: (a) with fixed inner-dimension, (b) with outer-dimension, and (c) variation in both inner-and outerdimensions are extensively investigated in this paper. The relationships for the inductance, Q-factor and self-resonance frequency (SRF) with various geometrical parameters, such as track width, track spacing, and turn numbers are examined on an extensive experiment basis. These performance trends can be a good guideline for practical inductor designs in RFICs.

Analytical Optimization of High Performance and High Quality Factor Mems Spiral Inductor

“…When self-resonance happens, the inductive reactance and parasitic capacitive reactance become equal. This means that the imaginary part of the one-port input impedance is equal to zero [9]. As seen from Equation (6), the parasitic capacitance due to inter-winding capacitance can be reduced by choosing a suitable distance between the spiral turns which lead to increase the self-resonant frequency.…”

“…While at high frequencies, Q-factor will be dominated by substrate loss. Therefore, narrower track width or smaller outer-dimension will be better for minimizing the occupied chip area, thus minimizing substrate loss [9]. At high frequency penetration of magnetic field and current into conductor decreases, and the current flowing in the outer area of conductor which this phenomenon is called skin effect.…”

“…These parameters determine the performance of a spiral inductor [9]. Figure 1 shows the schematics of the proposed spiral inductor.…”

Mixed-Mode Impedance and Reflection Coefficient of Two-Port Devices

“…Now, by means of (20), the voltage and currents at each node of the DUT can be rewritten as a function of a 1 as (22) where in (21) the upper and lower signs hold for port 1 and port 2, respectively. As a matter of fact, only when the two-port device is symmetric, (21) …”

Optimization Ofspiral Inductor With Different Inner Diameters

“…The efficiency of spiral inductor is depending on quality factor of the signal. The researchers have been design using suitable inductor model by using substrate material and geometric calculation to improve the low quality factor of the inductor [16][17][18].…”