Performance of THz Components Based on Microstrip PECVD SiN<sub>x</sub>Technology

Finkel, Matvey; Thierschmann, Holger; Galatro, L.; Katan, Allard J.; Thoen, David J.; Visser, Pieter de; Spirito, M.; Klapwijk, T. M.

doi:10.1109/tthz.2017.2759507

Cited by 3 publications

(5 citation statements)

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“…In order to test this concept, we have realized a series of balanced branchline couplers on a Si substrate using the technol-ogy described by Finkel et al 19 All structures consist of 3 µm thin SiN x (ε r = 5.9) serving as a MS dielectric and 2/300 nm Ti/Au as ground plane and stripline. As THz source and detector we use a vector network analyser together with frequency multipliers that cover the WR-03 band (220 to 325 GHz) and a GSG landing probe setup (for details see Finkel et al, Ref.…”

Section: Balanced Branchline Coupler As On-chip Interferometermentioning

confidence: 99%

“…As THz source and detector we use a vector network analyser together with frequency multipliers that cover the WR-03 band (220 to 325 GHz) and a GSG landing probe setup (for details see Finkel et al, Ref. 19 ). Note however, that our concept is also compatible with other THz sources and detectors, for instance photomixers 23,24 .…”

Section: Balanced Branchline Coupler As On-chip Interferometermentioning

confidence: 99%

“…The signal is launched and picked up from the circuit via the ports labeled 1 and 4 in Fig. 2a, which consist of co-planar waveguide type fixtures 19 (not visible) that enable coupling of THz signals into the circuit with the landing probes. The λ /4-branches of the coupler have a length of 130 µm, corresponding to a branchline coupler center frequency of f c = 270 GHz.…”

Section: Balanced Branchline Coupler As On-chip Interferometermentioning

confidence: 99%

“…(ε 0.81 e f f + 0.26(w/h) 0.8544 + 0.236) (ε 0.81 e f f − 0.189(w/h) 0.8544 + 0.87) for which we have used the stripline width w = 3.75 µm, dielectric thickness h = 3 µm, ε e f f = 4.47, PECVD SiN x dielectric constant ε r = 5.9 19 , characteristic impedance Z 0 = 55.5 Ω and the vacuum speed of light c = 3 × 10 8 m/s.…”

Section: Appendix: Analytical Model For the Balanced Branchline Couplermentioning

confidence: 99%

“…Picking up on this development, we have recently reported on a microstrip (MS) fabrication technology based on PECVD SiN x , that is compatible with thin film membranes. For this technology losses are sufficiently well controlled at frequencies around 0.3 THz, such that the realization of room-temperature THz on-chip components is feasible 19 . Here, we use this technology to extend scanning impedance microscopy from microwaves into the THz frequency range.…”

Section: Introductionmentioning

confidence: 99%

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Shielded cantilever with on-chip interferometer circuit for THz scanning probe impedance microscopy

Finkel

Thierschmann

Katan

et al. 2019

Review of Scientific Instruments

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We have realized a microstrip based THz near field cantilever which enables quantitative measurements of the impedance of the probe tip at THz frequencies (0.3 THz). A key feature is the on-chip balanced hybrid coupler which serves as an interferometer for passive signal cancellation to increase the readout circuit sensitivity despite extreme impedance mismatch at the tip. We observe distinct changes in the reflection coefficient of the tip when brought into contact with different dielectric (Si, SrTiO 3 ) and metallic samples (Au). By comparing to finite element simulations we determine the sensitivity of our THz probe to be well below 0.25 fF. The cantilever further allows for topography imaging in a conventional atomic force microscope mode. Our THz cantilever removes several critical technology challenges and thus enables a shielded cantilever based THz near field microscope.

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Section: Balanced Branchline Coupler As On-chip Interferometermentioning

confidence: 99%

Section: Balanced Branchline Coupler As On-chip Interferometermentioning

confidence: 99%

Section: Balanced Branchline Coupler As On-chip Interferometermentioning

confidence: 99%

Section: Appendix: Analytical Model For the Balanced Branchline Couplermentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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