Performance of Sinusoidal Scanning With MPC in AFM Imaging

Rana, M. S.; Pota, H. R.; Petersen, Ian R.

doi:10.1109/tmech.2013.2295112

Cited by 79 publications

(33 citation statements)

References 32 publications

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“…The currently available AFM's scanning speed is limited to less than 0.01f r , where f r is the frequency of the first resonant mode of the PTS [60][61][62]. The most exigent issue that causes problems for the high-speed nanopositioning of a PTS is its low mechanical resonance frequency to which its bandwidth is limited.…”

Section: Mechanical Vibrationsmentioning

confidence: 99%

A Survey of Methods Used to Control Piezoelectric Tube Scanners in High‐Speed AFM Imaging

Rana

Pota

Petersen

2018

Asian Journal of Control

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In most nanotechnology applications, speed and precision are important requirements for obtaining good topographical maps of material surfaces using atomic force microscopes (AFMs), many of which use piezoelectric tube scanners (PTSs) for scanning and positioning at nanometric resolutions. For control engineers, the PTS is particularly interesting since its ability to enable the AFM to undertake 3D imaging is entirely dependent upon the use of a feedback loop. However, it suffers from various intrinsic problems that degrade its positioning performance, such as: (i) lightly damped low-frequency resonant modes due to its mechanical structure; (ii) nonlinear behavior due to hysteresis and creep; (iii) the cross-coupling effect between its axes (in 3D positioning systems such as AFMs); and (iv) effect of thermal drift. This article presents a survey of the literature on the PTS, an overview of a few existing innovative solutions for its nanopositioning and future research directions. This article will help the reader to walk around the present development of the PTS aimed at meeting the requirements for high-speed AFM imaging.

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Section: Mechanical Vibrationsmentioning

confidence: 99%

A Survey of Methods Used to Control Piezoelectric Tube Scanners in High‐Speed AFM Imaging

Rana

Pota

Petersen

2018

Asian Journal of Control

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“…It is worth noticing that in conventional AFM systems, the force f z cannot be measured independent of the longitudinal force f y . Thus, the developed system can be employed when the scanning-trajectory results in significant f y , such as in the spiral or Lissajous scans [36]- [38] that find applications in high-speed AFM.…”

Section: Real-time Force Control Using the Measurement Systemmentioning

confidence: 99%

Direct Measurement of Three-Dimensional Forces in Atomic Force Microscopy

Mrinalini

Sriramshankar

Jayanth

2015

IEEE/ASME Trans. Mechatron.

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Direct measurement of three-dimensional (3-D) forces between an atomic force microscope (AFM) probe and the sample benefits diverse applications of AFM, including force spectroscopy, nanometrology, and manipulation. This paper presents the design and evaluation of a measurement system, wherein the deflection of the AFM probe is obtained at two points to enable direct measurement of all the three components of 3-D tip-sample forces in real time. The optimal locations for measurement of deflection on the probe are derived for a conventional AFM probe. Further, a new optimal geometry is proposed for the probe that enables measurement of 3-D forces with identical sensitivity and nearly identical resolution along all three axes. Subsequently, the designed measurement system and the optimized AFM probe are both fabricated and evaluated. The evaluation demonstrates accurate measurement of tip-sample forces with minimal cross-sensitivities. Finally, the real-time measurement system is employed as part of a feedback control system to regulate the normal component of the interaction force, and to perform force-controlled scribing of a groove on the surface of polymethyl methacrylate.Index Terms-Atomic force microscopy (AFM), direct measurement of 3-D forces, force control, optical beam deflection.

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“…Commonly employed in an atomic force microscope (AFM) [7] as a scanner, a PTS contributes a lot in micro/nano scale imaging and manipulations [8][9][10][11][12]. An AFM in contact constant-force mode works in the following way (see Fig.…”

Section: Introductionmentioning

confidence: 99%

“…For examples, Das et al apply a double resonant controller in [10] to damp out the first resonant mode of the PTS and increase the closed-loop bandwidth; an optimal linear quadratic Gaussian (LQG) controller with a vibration compensator is designed by Habibullah et al in [11] for the same purpose; Rana et al employ an improved model predictive control (MPC) scheme in [12] to achieve high-speed scanning performance. Although good tracking accuracy may be achieved by a well-designed feedback controller alone, a phase-lag between the control input and the plant response usually exists.…”

Section: Introductionmentioning

confidence: 99%