Performance of Quad Mass Gyroscope in the Angular Rate Mode

Askari, Sina; Asadian, Mohammad H.; Shkel, Andrei M.

doi:10.3390/mi12030266

Cited by 14 publications

(7 citation statements)

References 47 publications

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“…To reduce the quadrature error signal on the final output signal of the gyroscope, researchers have proposed many methods [ 19 , 20 , 21 , 22 , 23 , 24 , 25 ] to suppress the quadrature signal, and therefore to reduce the bias.…”

Section: Principle Of the Online Bist Of The Mems Gyroscopementioning

confidence: 99%

Real-Time Built-In Self-Test of MEMS Gyroscope Based on Quadrature Error Signal

Feng

Wang

Qiao³

et al. 2021

Micromachines

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In high-reliability applications, the health condition of the MEMS gyroscope needs to be known in real time to ensure that the system does not fail due to the wrong output signal. Because the MEMS gyroscope self-test based on the principle of electrostatic force cannot be performed during the working state. We propose that by monitoring the quadrature error signal of the MEMS gyroscope in real time, an online self-test of the MEMS gyroscope can be realized. The correlation between the gyroscope’s quadrature error amplitude signal and the gyroscope scale factor and bias was theoretically analyzed. Based on the sixteen-sided cobweb-like MEMS gyroscope, the real-time built-in self-test (BIST) method of the MEMS gyroscope based on the quadrature error signal was verified. By artificially setting the control signal of the gyroscope to zero, we imitated several scenarios where the gyroscope malfunctioned. Moreover, a mechanical impact table was used to impact the gyroscope. After a 6000 g shock, the gyroscope scale factor, bias, and quadrature error amplitude changed by −1.02%, −5.76%, and −3.74%, respectively, compared to before the impact. The gyroscope failed after a 10,000 g impact, and the quadrature error amplitude changed −99.82% compared to before the impact. The experimental results show that, when the amplitude of the quadrature error signal seriously deviates from the original value, it can be determined that the gyroscope output signal is invalid.

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Section: Principle Of the Online Bist Of The Mems Gyroscopementioning

confidence: 99%

Real-Time Built-In Self-Test of MEMS Gyroscope Based on Quadrature Error Signal

Feng

Wang

Qiao³

et al. 2021

Micromachines

View full text Add to dashboard Cite

show abstract

“…MEMS CVGs act as an angular sensor based on the Coriolis principle [ 7 ], energy transfer occurs between two orthogonal modes—the drive mode and the sense mode—when working in normal operating conditions [ 8 ]. For operation, the drive mode realizes the resonant frequency tracking by a phase-locked loop (PLL) and the drive amplitude stabilization by an automatic gain control (AGC) loop [ 9 ]; the sense mode obtains the information about the input angular rate.…”

Section: Introductionmentioning

confidence: 99%

Online Compensation of Phase Delay Error Based on P-F Characteristic for MEMS Vibratory Gyroscopes

Liu

Qin

2022

Micromachines

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In this paper, an online compensation method of phase delay error based on a Phase-Frequency (P-F) characteristic has been proposed for MEMS Coriolis Vibratory Gyroscopes (CVGs). At first, the influences of phase delay were investigated in the drive and sense mode. The frequency response was acquired in the digital control system by collecting the demodulation value of drive displacement, which verified the existence and influence of the phase delay. In addition, based on the P-F characteristic, that is, when the phase shift of the nonresonant drive force through the resonator is almost 0° or 180°, the phase delay of the gyroscope is measured online by injecting a nonresonant reference signal into the drive-mode dynamics. After that, the phase delay is self-corrected by adjusting the demodulation phase angle without affecting the normal operation of the gyroscopes. The approach was validated with an MEMS dual-mass vibratory gyroscope under double-loop force-to-rebalance (in-phase FTR and quadrature FTR) closed-loop detection mode and implemented with FPGA. The measurement results showed that this scheme can detect and compensate phase delay to effectively eliminate the effect of the quadrature error. This technique reduces the zero rate output (ZRO) from −0.71°/s to −0.21°/s and bias stability (BS) from 23.30°/h to 4.49°/h, respectively. The temperature sensitivity of bias output from −20 °C to 40 °C has reached 0.003 °/s/°C.

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“…Since the introduction of first MEMS rate gyroscopes and accelerometers thanks to the work of miniaturization of inertial systems carried out by Draper Laboratory in the late 1980s [ 9 , 10 ], the precision of MEMS gyroscopes has improved a lot in the last decades, from a bias of few hundred degrees per hour [ 9 , 11 ] to few degrees per hour [ 12 , 13 , 14 , 15 ]. Moreover, as a result of all of these years of research in MEMS gyroscope mechanical design and to the unceasing improvements in microfabrication, silicon, high-quality packaging, and electronics technology, MEMS gyroscopes with

bias and

ARW (angular random walk) are now a reality [ 16 , 17 , 18 , 19 ].…”

Section: Introductionmentioning

confidence: 99%

“…Vibrating gyroscopes consist of one or more mobile vibrating masses [ 17 , 20 , 21 ] connected to each other and to their support by bending beams (which act as springs) in order to constitute an excitation resonator and a detection resonator, the two being coupled to each other by the Coriolis acceleration [ 22 ]. Thus, when the gyroscope rotates around its sensitive axis, the composition of the forced vibration with the angular rotation vector generates forces, through the Coriolis effect, which induces vibration of the moving masses in the axis orthogonal to sensitive axis and forced vibration axis.…”

Section: Introductionmentioning

confidence: 99%

The Effect of the Bending Beam Width Variations on the Discrepancy of the Resulting Quadrature Errors in MEMS Gyroscopes

et al. 2022

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In this paper, we develop a new approach in order to understand the origin of the quadrature error in MEMS gyroscopes. As the width of the flexure springs is a critical parameter in the MEMS design, it is necessary to investigate the impact of the width variations on the stiffness coupling, which can generate a quadrature signal. To do so, we developed a method to determine the evolution of the stiffness matrix of the gyroscope springs with respect to the variation of the bending beams width of the springs through finite element analysis (FEA). Then, a statistical analysis permits the computation of the first two statistical moments of the quadrature error for a given beam width defect. It turns out that even small silicon etching defects can generate high quadrature level with up to a root mean square (RMS) value of 1220°/s for a bending beam width defect of 0.9%. Moreover, the quadrature error obtained through simulations has the same order of magnitude as the ones measured on the gyroscopes. This result constitutes a great help for designing MEMS gyroscopes, as the consideration of the bending beams width defects is needed in order to avoid high quadrature error.

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Performance of Quad Mass Gyroscope in the Angular Rate Mode

Cited by 14 publications

References 47 publications

Real-Time Built-In Self-Test of MEMS Gyroscope Based on Quadrature Error Signal

Real-Time Built-In Self-Test of MEMS Gyroscope Based on Quadrature Error Signal

Online Compensation of Phase Delay Error Based on P-F Characteristic for MEMS Vibratory Gyroscopes

The Effect of the Bending Beam Width Variations on the Discrepancy of the Resulting Quadrature Errors in MEMS Gyroscopes

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