Performance of Piezoelectrets Made of Non-Porous Polytetrafluoroethylene and Fluoroethylenepropylene Layers

Piezoelectrets fabricated from fluoroethylenepropylene (FEP)-foils have shown drastic increase of their piezoelectric properties during the last decade. This led to the development of FEP-based energy harvesters, which are about to evolve into a technology with a power-generation-capacity of milliwatt per square-centimeter at their resonance frequency. Recent studies focus on piezoelectrets with solely negative charges, as they have a better charge stability and a better suitability for implementation in rising technologies, like the internet of things (IOT) or portable electronics. With these developments heading towards applications of piezoelectrets in the near future, there is an urgent need to also address the fabrication process in terms of scalability, reproducibility and miniaturization. In this study, we firstly present a comprehensive review of the literature for a deep insight into the research that has been done in the field of FEP-based piezoelectrets. For the first time, we propose the employment of microsystem-technology and present a process for the fabrication of thermoformed FEP piezoelectrets based on thermoforming SU-8 templates. Following this process, unipolar piezoelectrets were fabricated with air void dimensions in the range of 300–1000 $$\upmu \text {m}$$ μ m in width and approx. 90 $$\upmu \text {m}$$ μ m in height. For samples with a void size of 1000 $$\upmu \text {m}$$ μ m , a $$d_{33}$$ d 33 -coefficient up to 26,508 pC/N has been achieved, depending on the applied seismic mass. Finally, the properties as energy harvester were characterized. At the best, an electrical power output of 0.51 mW was achieved for an acceleration of 1 $$\times$$ × g with a seismic mass of 101 g. Such piezoelectrets with highly defined dimensions show good energy output in relation to volume, with high potential for widespread applications.

show abstract

Fabrication process for FEP piezoelectrets based on photolithographically structured thermoforming templates

Flachs

Emmerich²,

Thielemann³

2022

Microsyst Technol

View full text Add to dashboard Cite

show abstract

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

hi@scite.ai

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

Performance of Piezoelectrets Made of Non-Porous Polytetrafluoroethylene and Fluoroethylenepropylene Layers

Cited by 1 publication

References 19 publications

Fabrication process for FEP piezoelectrets based on photolithographically structured thermoforming templates

Fabrication process for FEP piezoelectrets based on photolithographically structured thermoforming templates

Contact Info

Product

Resources

About