Performance of a novel micro force vector sensor and outlook into its biomedical applications

Measurement and Control

Jing

2014

Measuring the micro-nano-force is a hotspot in science and engineering. This paper focuses on a novel theory and method using the vibration amplitude of spherical film to measure the micro-force. The latex spherical film, with the diameter from 48 to 62 mm, is considered as sensing element, and the force or the mass is applied on the top of spherical film which results in the laser beam on the side surface of spherical film forming a bias. The bias measured by position sensitive detector sensor reflects the quantity of the micro-force or the mass. Experiments are designed to analyze the relation among the applied force, the diameter and thickness of spherical film, and vibration amplitude. Additionally, the fitting formula of these four parameters is obtained using the least square algorithm. On the full scale of 1.85-10.84 mN, this system can be used to measure the micro-force in the error range of −2.5% to 2.3%.

Section: Calibration Of the Psd Transducermentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Measurement of Micro-Force Using the Vibration of a Spherical Latex Film

Measurement and Control

Jing

2014

“…At present, the measurement of micro-forces is mainly performed by using piezoelectric transducer (PZT) or microelectromechanical system (MEMS) techniques. Small piezoresistive force sensors of 20032003640 mm 3 have been developed to obtain haptic feedback of the forces acting on a guide wire's tip during vascular catheterization (Meiss et al, 2011); the measured force was at the level of mN. A three-axis micro-force sensor (Muntwyler et al, 2010) with adjustable force range from 620 to 6200 mN was designed and it was a novel microfabrication process based on a double silicon-oninsulator (SOI) substrate.…”

Section: Introductionmentioning

confidence: 99%

Dynamic analysis of spherical film as sensing element for detecting micro-force

Transactions of the Institute of Measurement and Control

2012

In order to realize the precise measurement of a micro-force in the biomedical domain and industrial fields, a type of spherical film, of about 700 nm thickness and 50 mm diameter, was used as sensing element to detect a nano-Newton (nN) level force. Distortions were observed when nN-level particles were placed on the spherical film or such level forces were applied on the spherical film. From the deformation of spherical film, we can obtain the gravity of the particle or applied force. A dynamic model of the spherical film was constructed using the ANSYS software. Adopting the orthogonal experimental method, we designed effective experimental parameters for numerical calculation and mainly focused on the relations among nN-level force, thickness and diameter of spherical film, and deformation parameters. Then a fitting formula describing the relationship between deformation, the thickness and diameter of the spherical film, and the loaded force was obtained from the experimental data using the least square algorithm. The error analysis of experimental and computational data showed that when controlling the force in the range of 20–160 nN, the detecting error was less than ±3.2%.

“…The standard deviation of the noise level of the capacitive readout corresponded to 1.4 mN and 3.6 mNÁm, respectively, at a readout frequency of 30 Hz. Furthermore, very small piezoresistive force sensors of 200Á200Á640 mm 2 (Meiss et al, 2011) were developed for a 'HapCath' system, which provides haptic feedback of the forces acting on a guide wire's tip during vascular catheterization. The basic sensor performance was characterized, revealing a force resolution better than 1 mN, an overload resistance higher than 600 mN and a transfer characteristic from static to more than 1 MHz.…”

Section: Introductionmentioning

confidence: 99%

A thin film micro-force sensor using double concentric circle optical fibre

Transactions of the Institute of Measurement and Control

Jing

2012

For the purpose of measuring mN-and mN-level micro-force, the optical reflection characteristics of a circular thin film are utilized to develop a micro-force sensor and double concentric circle fibres are used to measure the micro-force. This paper focuses on the relation between the output parameters of the system, namely the voltage ratio of the two receiving fibres, and the micro-force, the diameter, the thickness and the materials of the thin film, as well as the displacement between the fibre probe and the film. A measurement platform has been set-up and a large number of experiments have been conducted to determine the relationship between the voltage ratio and the micro-force, the diameter and the thickness of the thin film by using a least square exponential fitting algorithm. Furthermore, the errors between the calculating values from the fitting equation and the experimental values are obtained and analysed, which supports the conclusion that when the micro-force is in the range of 0-10 mN, the equation can be used to measure the micro-force with the resolution of 10 mN in the error range of -1.5%-+ 2.5%, and an automatic measurement process is realized.