Performance of a new high-resolution electron energy-loss spectroscopy microscope

Abstract

Abstract. 2014 We have been developing a new instrument for high resolution electron energy-loss spectroscopy (EELS). It is composed of a JEM-1200EX transmission electron microscope -the basic component -and two Wien filters (a monochrometer and an analyzer) with retardation lenses and acceleration lenses. The stigmatic focus has been achieved by a special design of the Wien filter. A spatial resolution of 190nm, and a momentum resolution (203C0/03BB) of 0.069Å-1 have been obtained.The energy resolution has attained so far to a value of 81 meV.

The impact of EELS in materials science

“…Even though the currently resolution is not far from the ultimate limit for core-hole spectroscopy imposed by core hole lifetimes, it is not sufficient for investigations of band structures, energy levels of electronic defects and of vibrational modes. Tb improve the energy resolution to a few meV, it is necessary to monochromate the electron beam before it reaches the specimen (see Krivanek et al [6], lérauchi et aL [7]). …”

Electron Energy-Loss Spectroscopy Study of the Electronic Structure of Li- and V-Dopedβ-Rhombohedral Boron

“…EELS spectra were obtained from specimen areas of 180 nm in diameter with a thickness of about 100 nm by the high-resolution EELS microscope. The EELS microscope used was developed as a project of Joint Research with Industry by the Ministry of Education, Science, Sports, and Culture (8,9). It is equipped with a thermal-type field emission gun as the electron source and specially designed double-focus Wien filters as the monochromator and analyzer.…”

“…In the present study, the electronic structures of Li V B (x"5.8 and 7.9) and V B are investigated using a high-resolution electron energy-loss spectroscopy (EELS) microscope (8,9). We measured the band gap energy and volume plasmon energy.…”

Electron Energy-Loss Spectroscopy Study of the Electronic Structure ofα-Rhombohedral Boron

“…We acquired high-resolution EELS spectra from good single crystalline areas of -r-B using a high-resolution EELS microscope (14,15). We measured the band gap energy and volume plasmon energy.…”