2011
DOI: 10.1587/elex.8.1461
|View full text |Cite
|
Sign up to set email alerts
|

Performance improvement of pentacene based organic field-effect transistor with HfON gate insulator

Abstract: Pentacene based organic field-effect transistors (OFETs) with SiO 2 and HfON gate insulators have been fabricated, and the effect of deposition temperature and deposition rate on the grain sizes of pentacene films was investigated. It was found that the grain sizes of pentacene films increase with increasing deposition temperature and decreasing deposition rate. Due to the increase in grain size, pentacene based OFET with HfON gate insulator shows enhanced electrical properties, such as a low subthreshold swin… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1

Citation Types

0
4
0

Year Published

2012
2012
2019
2019

Publication Types

Select...
5

Relationship

3
2

Authors

Journals

citations
Cited by 5 publications
(4 citation statements)
references
References 13 publications
0
4
0
Order By: Relevance
“…SS should be as small as possible for high-speed and low-voltage operation. The SS of 0.13 V/decade is comparable to or even better than that of OFETs fabricated at high temperatures of above 800 C. 7,8,15) In addition, the OFET with channel W=L ¼ 500=50 m has a hole mobility () of 0.26 cm 2 V À1 s À1 , which leads to a C i of 273 nF V À1 s À1 , suggesting that our OFET can provide high drain-current drivability. 5,15) It is known that the electrical properties of OFETs do not only depend on the morphology of organic semiconductors 4,5) but also depend on the contact resistance (R C ) between the electrodes and the semiconductor layers.…”
Section: Resultsmentioning
confidence: 63%
See 1 more Smart Citation
“…SS should be as small as possible for high-speed and low-voltage operation. The SS of 0.13 V/decade is comparable to or even better than that of OFETs fabricated at high temperatures of above 800 C. 7,8,15) In addition, the OFET with channel W=L ¼ 500=50 m has a hole mobility () of 0.26 cm 2 V À1 s À1 , which leads to a C i of 273 nF V À1 s À1 , suggesting that our OFET can provide high drain-current drivability. 5,15) It is known that the electrical properties of OFETs do not only depend on the morphology of organic semiconductors 4,5) but also depend on the contact resistance (R C ) between the electrodes and the semiconductor layers.…”
Section: Resultsmentioning
confidence: 63%
“…Interestingly, the employment of a HfON gate insulator can result in excellent interface properties in OFETs, thereby considerably improving their electrical properties. 7,8) However, the fabrication temperature for a HfON gate insulator is higher than 150 C, which restricts the choice of flexible substrate materials for OFETs. 9) On the other hand, it is accepted that channel length scaling is a good way to further increase the draincurrent drivability for OFETs.…”
Section: Introductionmentioning
confidence: 99%
“…Bottom-gate-type pentacenebased OFETs were fabricated on n þ -Si(100) substrates (resistivity, 1-6 m cm) with a top-contact bottom-gate device geometry. [14][15][16][17][18] First, n þ -Si(100) substrates were chemically cleaned by a sulfuric peroxide mixture (SPM) and diluted hydrofluoric acid (DHF). Next, a 0.7-nm-thick chemical oxide (C'O) layer was formed on the Si substrates by immersion in 30% H 2 O 2 solution for 60 min at room temperature to improve the interface quality.…”
Section: Methodsmentioning
confidence: 99%
“…[4][5][6] Currently, the p-type characteristics of pentacene have been reported in many different aspects, for example, treatment of surface, growth method, and so on. [7][8][9][10][11] However, the complementary metal-oxide-semiconductor (CMOS) FET for low-voltage operation requires both p-and n-type semiconductors. Presently, most organic semiconductors are suitable for either p-or n-type OFETs.…”
mentioning
confidence: 99%