Performance evaluation of piezoelectric sensor/actuator on active vibration control of a smart beam

This paper describes a design method for optimizing sensitivity of piezoresistive pressure sensor in high-pressure and high-temperature environment. In order to prove the method, a piezoresistive pressure sensor (HPTSS) is designed. With the purpose of increasing sensitivity and to improve the measurement range, the piezoresistive sensor adopts rectangular membrane and thick film structure. The configuration of piezoresistors is arranged according to the characteristic of the rectangular membrane. The structure and configuration of the sensor chip are analyzed theoretically and simulated by the finite element method. This design enables the sensor chip to operate in high pressure condition (such as 150 MPa) with a high sensitivity and accuracy. The silicon on insulator wafer is selected to guarantee the thermo stability of the sensor chip. In order to optimize the fabrication and improve the yield of production, an electric conduction step is devised. Series of experiments demonstrates a favorable linearity of 0.13% and a high accuracy of 0.48%. And the sensitivity of HTPSS is about six times as high as a conventional square-membrane sensor chip in the experiment. Compared with the square-membrane pressure sensor and current production, the strength of HPTTS lies in sensitivity and measurement. The performance of the HPTSS indicates that it could be an ideal candidate for high-pressure and high-temperature sensing in real application.

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“…The dimension of the HPTSS is 4 × 4 × 0.525 mm 3 . The size of rectangular membrane is 0.5 × 1.0 × 0.35 mm 3 .…”

Section: Structural Designmentioning

confidence: 99%

“…2 The piezoelectric transducer also has high sensitivity, but it requires a relatively high degree of measuring condition and signal process circuit. 3 The optical fiber grating sensor has strict limit of installation though it has high stability and accuracy. 4 The piezoresistive sensor is a mature technology in application.…”

Section: Introductionmentioning

confidence: 99%

Design optimization of high pressure and high temperature piezoresistive pressure sensor for high sensitivity

Niu

Zhao

Tian

2014

Review of Scientific Instruments

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“…The partial differential equation of the transverse motion of the flexible beam can be given in undamped Euler-Bernoulli form as follows [16]. 4 2…”

Section: A Dynamics Of the Flexible Structurementioning

confidence: 99%

“…The principles underlying active vibration control and its practical applications by combining materials from vibrations, mechanics, signal processing and control theory are summarized in a systematic approach in [2]. PZT transducers have been used as both actuators and sensors for the active vibration control in [3][4][5][6].…”

Section: Introductionmentioning

confidence: 99%

Experimental Study of Active Vibration Control of a Cantilever Beam

Khot¹,

Yelve²,

Shaik³

2013

2013 6th International Conference on Emerging Trends in Engineering and Technology

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The modern technology demands the system to be light and reliable. However, with the conventional vibration control techniques it is difficult to keep the system light with all the damping mechanisms. This work deals with the Active Vibration Control (AVC) of cantilever beam using piezoelectric (PZT) transducers. Active control involves the use of sensors to sense the vibratory motion of the structure, a controller to generate a control signal and an amplifier to amplify the control signal and an actuator which exerts control force on the structure to reduce the vibrations. An experimental setup is made, consisting of the aluminum cantilever beam with the PZT patches mounted on both the sides of the beam. A proportional-integralderivative (PID) controller is designed to generate the required control signal. A high frequency switch mode power converter is designed to generate high voltage required for the actuator to produce the control force. Experiments are performed for the active control of vibration. It is observed that there is reduction in settling time. The experimental results are then verified by the simulation results obtained from MATLAB © .

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“…Such structures are called smart or adaptive structures, and control applications are important for these systems [1][2][3][4][5][6]. Piezoelectric materials have important characteristics to create smart structures [7].…”

Section: Introductionmentioning

confidence: 99%

H2, Hinfinity and H2/Hinfinity Control of Elastic Beam Vibrations Using Piezoelectric Actuator

Bolat

Sivrioğlu

2017

ijamec

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Abstract:In this research study, vibration of an elastic cantilever beam is suppressed with norm based controllers by using the piezoelectric actuator. Beam like distributed parameter structures have theoretically infinite number of vibration modes and uncontrolled high frequency vibration modes in a control application may be excited by the controller due to spillover effect. In this paper, 2 H , H  and mixed norm objective 2 / HH  controllers are designed by introducing a multiplicative uncertainty which represents unmodeled high-frequency dynamics in the control system. The designed controllers are realized in experiments and performances of the controllers are compared using frequency and time domain responses.

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Performance evaluation of piezoelectric sensor/actuator on active vibration control of a smart beam

Cited by 12 publications

References 17 publications

Design optimization of high pressure and high temperature piezoresistive pressure sensor for high sensitivity

Design optimization of high pressure and high temperature piezoresistive pressure sensor for high sensitivity

Experimental Study of Active Vibration Control of a Cantilever Beam

H2, Hinfinity and H2/Hinfinity Control of Elastic Beam Vibrations Using Piezoelectric Actuator

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