Performance Evaluation of Crack-Like ZnO/PSi Nanostructure Chemical Solution Sensor via Electrochemical Impedance Technique

Abstract

Electrochemical impedance spectroscopy (EIS) has been broadly used to investigate a variety of other electrochemical systems, including electrodeposition, corrosion, fuel cells and batteries. Here, a new approach to characterize chemical sensors based on the ZnO/porous Si (PSi) nanostructure arrays via an EIS technique is reported. ZnO nanostructures were successfully synthesized on the PSi structures using the free-catalytic thermal immersion method. Detailed characterization of this nanostructure was carried out by atomic force microscopy, field emission scanning electron microscopy and EIS. EIS analysis was used for two classified groups; polar and non-polar solvents. The performance evaluation of ZnO/PSi nanostructure sensors showed rapid and high response compared to a PSi nanostructure that may attribute to the regular morphology and suitable thickness for sensing.