Performance evaluation of a trace-moisture analyzer based on cavity ring-down spectroscopy: Direct comparison with the NMIJ trace-moisture standard

Abe, Hisashi; Yamada, Kōichi

doi:10.1016/j.sna.2010.11.005

Cited by 45 publications

(26 citation statements)

References 26 publications

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“…Spectroscopic measurements have also an impact on the gas metrology [30,31]. The determination of gas composition and impurities in technological processes is recognized as an important problem, especially in the semiconductor industry [32].…”

Section: Introductionmentioning

confidence: 99%

Line-shape study of self-broadened O2transitions measured by Pound-Drever-Hall-locked frequency-stabilized cavity ring-down spectroscopy

Wójtewicz¹,

Lisak²,

Cygan³

et al. 2011

Phys. Rev. A

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We present high-sensitivity and high-spectral-resolution line-shape and line-intensity measurements of self-band transitions measured using the Pound-Drever-Hall-locked frequency-stabilized cavity ring-down spectroscopy technique. We give collisional broadening parameters and take into account the line-narrowing effects described by Dicke narrowing or the speed dependence of collisional broadening. We compare line intensities measured with relative uncertainties below 0.4% to data available in the HITRAN spectroscopic database.

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Section: Introductionmentioning

confidence: 99%

Line-shape study of self-broadened O2transitions measured by Pound-Drever-Hall-locked frequency-stabilized cavity ring-down spectroscopy

Wójtewicz¹,

Lisak²,

Cygan³

et al. 2011

Phys. Rev. A

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“…Apart from dTDLAS, a variety of laser spectrometers have been employed aiming for high-accuracy H 2 O measurements, e.g., comparing results to a primary trace-moisture standard [30], performing absolute measurements of water vapor densities reaching an overall uncertainty of 0.8% [31], utilizing a frequency-stabilized cavity ring-down spectroscopy spectrometer for high-precision measurements of trace water vapor concentration and reaching a minimum detection of water vapor concentration of 0.7 ppb [32], applying wavelength modulation spectroscopy for H 2 O detection in combustion gases and achieving a precision of 2.1% [33], performing improved measurements of water vapor in the upper troposphere and lower stratosphere using direct absorption spectroscopy and comparing the results to other instruments [34] to understand discrepancies and measurements of spectral parameters of water-vapor transitions [35][36][37].…”

Section: Introductionmentioning

confidence: 99%

H2O Collisional Broadening Coefficients at 1.37 µm and Their Temperature Dependence: A Metrology Approach

2021

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We report self- and air collisional broadening coefficients for the H2O line at 7299.43 cm−1 and corresponding temperature coefficients for a temperature range spanning 293–573 K. New laser spectroscopic setups specifically designed for this purpose have been developed and are described. The line parameters reported here are in good agreement with those values reported in the HITRAN 2020 database, but the uncertainties have been reduced by factors of about 4, 1.3 and 4.4 for the self-broadening coefficient, air broadening coefficient and the temperature exponent of air broadening, respectively. Further, we combined our measurement approach with metrological data quality objectives, addressing the traceability of the results to the international system of units (SI) and evaluated the uncertainties following the guide to the expression of uncertainty in measurement (GUM).

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“…For any methods of moisture measurement, calibration is inevitable, and the calibration of a particular sensor should be traceable to an international standard [ 7 ]. It is also important to periodically validate the sensor accuracy against the calibrated values while the sensor is running in the field of measurement such as in factories and in pipe lines [ 8 ].…”

Section: Introductionmentioning

confidence: 99%

A Novel Method and an Equipment for Generating the Standard Moisture in Gas Flowing through a Pipe

Tsukahara¹,

Hirayama²,

Takeda³

et al. 2018

Sensors

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When inert gas containing water molecules flows into a metal pipe, the water molecules cannot exit instantaneously from the outlet of the pipe but are captured at adsorption sites on the inner surface of the pipe until most of the sites are occupied. A theoretical model and a subsequent experiment in this article show that the delay time depends on the amount of moisture level; the higher the moisture-level, the shorter the delay time. Based on the result, we propose a new method and its implementation to the validation of a standard moisture generation to be used in the field measurement such as in factories and pipe lines.

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Performance evaluation of a trace-moisture analyzer based on cavity ring-down spectroscopy: Direct comparison with the NMIJ trace-moisture standard

Cited by 45 publications

References 26 publications

Line-shape study of self-broadened O2transitions measured by Pound-Drever-Hall-locked frequency-stabilized cavity ring-down spectroscopy

Line-shape study of self-broadened O2transitions measured by Pound-Drever-Hall-locked frequency-stabilized cavity ring-down spectroscopy

H2O Collisional Broadening Coefficients at 1.37 µm and Their Temperature Dependence: A Metrology Approach

A Novel Method and an Equipment for Generating the Standard Moisture in Gas Flowing through a Pipe

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