Performance analysis of piezoelectric cantilever bending actuators

Wang, Qing-Ming; Cross, L. E.

doi:10.1080/00150199808229562

Cited by 174 publications

(114 citation statements)

References 8 publications

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“…The experimental data were compared with the analytical maximum blocking force of a piezoelectric unimorph actuator (Eq. (9)) as described by Wang and Cross [22].…”

Section: Force and Displacement Measurements Using The Calibrated Formentioning

confidence: 99%

“…10) was compared with the analytical expression for the resonant frequency of a cantilever beam, as shown in Eq. (7) [22], to extract the PZT thin film Young's modulus. The actuator is considered as being a bi- Table 2 Force and displacement slopes and piezoresistive coefficient for several force sensors layered cantilever made of silicon and PZT.…”

Section: Free Displacement Measurements Of the Actuatorsmentioning

confidence: 99%

“…SEM photomicrographs of a PZT cantilever. The experimental displacement curves were compared with the analytical model described by Wang and Cross [22] (Eq. (8)).…”

Section: Free Displacement Measurements Of the Actuatorsmentioning

confidence: 99%

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Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor

Duval

Wilson

Ensell³

et al. 2007

Sensors and Actuators A: Physical

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This paper reports on the measurements of displacement and blocking force of piezoelectric micro-cantilevers. The free displacement was studied using a surface profiler and a laser vibrometer. The experimental data were compared with an analytical model which showed that the PZT thin film has a Young's modulus of 110 GPa and a piezoelectric coefficient d 31,f of 30 pC/N. The blocking force was investigated by means of a micro-machined silicon force sensor based on the silicon piezoresistive effect. The generated force was detected by measuring a change in voltage within a piezoresistors bridge. The sensor was calibrated using a commercial nano-indenter as a force and displacement standard. Application of the method showed that a 700 m long micro-cantilever showed a maximum displacement of 800 nm and a blocking force of 0.1 mN at an actuation voltage of 5 V, within experimental error of the theoretical predictions based on the known piezoelectric and elastic properties of the PZT film.

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“…The experimental data were compared with the analytical maximum blocking force of a piezoelectric unimorph actuator (Eq. (9)) as described by Wang and Cross [22].…”

Section: Force and Displacement Measurements Using The Calibrated Formentioning

confidence: 99%

Section: Free Displacement Measurements Of the Actuatorsmentioning

confidence: 99%

See 1 more Smart Citation

Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor

Duval

Wilson

Ensell³

et al. 2007

Sensors and Actuators A: Physical

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show abstract

“…3, it can be assumed that all the other stress components are very small compared with T 1 c and can be approximated as zero. 18,19 Further, it can be derived that the strain S 1 is related to the radius of the curvature R as, 19 …”

mentioning

confidence: 99%

Layer-by-layer self-assembled conductor network composites in ionic polymer metal composite actuators with high strain response

Liu

Montazami

Liu

et al. 2009

Applied Physics Letters

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“…Candidate actuators have high power densities at the centimeter to micrometer scales and favorable scaling effects as actuator size is reduced. The technologies selected for analysis can be divided into five categories: electrostatic [9], piezoelectric [10], thermal [11], shape memory [12], and dielectric elastomer [13]. An overview of the categories is given in Table II.…”

Section: Actuator Selectionmentioning

confidence: 99%

A review of actuation and power electronics options for flapping-wing robotic insects

Karpelson

Wei

Wood

2008

2008 IEEE International Conference on Robotics and Automation

133

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Abstract-Flapping-wing robotic insects require actuators with high power densities at centimeter to micrometer scales. Due to the low weight budget, the selection and design of the actuation mechanism needs to be considered in parallel with the design of the power electronics required to drive it. This paper explores the design space of flapping-wing microrobots weighing 1g and under by determining mechanical requirements for the actuation mechanism, analyzing potential actuation technologies, and discussing the design and realization of the required power electronics. Promising combinations of actuators and power circuits are identified and used to estimate microrobot performance.

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Performance analysis of piezoelectric cantilever bending actuators

Cited by 174 publications

References 8 publications

Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor

Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor

Layer-by-layer self-assembled conductor network composites in ionic polymer metal composite actuators with high strain response

A review of actuation and power electronics options for flapping-wing robotic insects

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