Performance analysis of on-chip coupled piezo/photodiodes, a numerical study

Rezaei, Nasim; Eftekhari, Zeinab; Zheng, Jian-Yao; Saive, Rebecca

doi:10.1016/j.sna.2023.114690

Cited by 2 publications

(1 citation statement)

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“…The smallest sample (D) nonetheless shows a relatively uniform displacement, which can arise from the increased stiffness of the membrane as a result of its minuscule dimension (see Figure 4d). Based on the simulations [39], at an excitation voltage of 0.2 V, for active area values larger than ≃6 × 6 mm 2 , the gravitational force dominates the piezoelectric force, causing the membrane to "cave in" in the middle part. This is consistent with the observations in Figure 4.…”

Section: Resultsmentioning

confidence: 99%

Spatial mapping of photovoltage and light-induced displacement of on-chip coupled piezo/photodiodes by Kelvin probe force microscopy under modulated illumination

Eftekhari,

Rezaei,

Stokkel

et al. 2023

Beilstein J. Nanotechnol.

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In this work, a silicon photodiode integrated with a piezoelectric membrane is studied by Kelvin probe force microscopy (KPFM) under modulated illumination. Time-dependent KPFM enables simultaneous quantification of the surface photovoltage generated by the photodiode as well as the resulting mechanical oscillation of the piezoelectric membrane with vertical atomic resolution in real-time. This technique offers the opportunity to measure concurrently the optoelectronic and mechanical response of the device at the nanoscale. Furthermore, time-dependent atomic force microscopy (AFM) was employed to spatially map voltage-induced oscillation of various sizes of piezoelectric membranes without the photodiode to investigate their position- and size-dependent displacement.

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Section: Resultsmentioning

confidence: 99%