PECVD synthesis of hexagonal boron nitride nanowalls from a borazine + ammonia mixture

Merenkov, I. S.; Косинова, М. Л.; Ermakova, Е. N.; Максимовский, Е. А.; Rumyantsev, Yu. M.

doi:10.1134/s0020168515100118

Cited by 11 publications

(14 citation statements)

References 14 publications

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“…We found the deposition temperature is critical parameter of morphology transformation. Our previous studies demonstrate that the h-BN nanowalls obtained by PECVD from borazine were structurally similar to the wavy nanowalls but they had the morphology of "maze-like" type [28,61]. We consider that the low-temperature highly oriented growth of the BNNWs demonstrated in the present study was possible mainly due to the particular chemical properties of the gas system containing organoboron compound and ammonia during PECVD process.…”

Section: Structural Featuressupporting

confidence: 51%

“…4(a)). According to HRTEM and secondary ion mass spectrometry results, the buffer layer is composed of amorphous boron nitride with silicon and oxygen atomic impurities possibly due to a native SiOx layer formed after chemical treatment [28]. However, the formation of the amorphous layer is not an indispensable prerequisite for vertical h-BN nanosheets growth.…”

Section: Growth Mechanismmentioning

confidence: 99%

“…High rates of reforming of organoboron compounds make the plasma process much safer compared to thermal processing of boron halides which requires sophisticated safety procedures as well as corrosion-resistant reactors. However, high rates of precursor decomposition in plasma often lead to chaotically oriented BN nanosheets with a mixed amorphous and nanocrystalline structure, and the process temperatures still remain high (~ 700 °C) [28,29].…”

Section: Introductionmentioning

confidence: 99%

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Orientation-controlled, low-temperature plasma growth and applications of h-BN nanosheets

et al. 2018

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Dimensionality and orientation of hexagonal boron nitride (h-BN) nanosheets are promising to create and control their unique properties for diverse applications. However, low-temperature deposition of vertically oriented h-BN nanosheets is a significant challenge. Here we report on the low-temperature plasma synthesis of maze-like h-BN nanowalls (BNNWs) from a mixture of triethylamine borane (TEAB) and ammonia at temperatures as low as 400 °C. The maze-like BNNWs contained vertically aligned stacks of h-BN nanosheets. Wavy h-BN nanowalls with randomly oriented nanocrystalline structure are also fabricated. Simple and effective control of morphological type of BNNWs by the deposition temperature is demonstrated. Despite the lower synthesis temperature, thermal stability and oxidation resistivity of the maze-like BNNWs are higher than for the wavy nanowalls. The structure and oxidation of the nanowalls was found to be the critical factor for their thermal stability and controlled luminescence properties. Cytotoxic study demonstrated significant antibacterial effect of both maze-like and wavy h-BN nanowalls against E. coli. The reported results reveal a significant potential of h-BN nanowalls for a broad range of applications from electronics to biomedicine.

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Section: Structural Featuressupporting

confidence: 51%

Section: Growth Mechanismmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Orientation-controlled, low-temperature plasma growth and applications of h-BN nanosheets

et al. 2018

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“…For this, the quartz tube-type reactor was used with a residual pressure of 1 × 10 −3 Torr (Figure S2). 29,30 The partial pressures of TEAB and ammonia were 1.3 × 10 −2 Torr. The synthesis setup was equipped with a resistance-type heater and a radio frequency plasma generator (Comdel) with a coil-type antenna.…”

Section: ■ Experimental Sectionmentioning

confidence: 99%

“…As one can see, h-BN nanowalls also cover the Au film (Figure 1d) with a smooth layer. We also performed atomic force microscopy to analyze the roughness and thickness of the resulting structures (Figure S5): the h-BN nanowalls create a surface roughness of less than 20 nm, 29,30 which limits their influence on the optical scattering spectra, as can also be inferred from optical images (Figure 1f, inset).…”

Section: ■ Experimental Sectionmentioning

confidence: 99%

Hierarchical Hexagonal Boron Nitride Nanowall-Decorated Silicon Nanoparticles for Tunable Ink-Free Coloring

Bataille

Merenkov

Yaroshenko

et al. 2022

ACS Appl. Nano Mater.

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Nanomaterials with tunable optical properties have emerged as active components for advanced nanophotonic devices. Herein, the fabrication of hierarchical nanostructures through the integration of various tunable nanomaterials for diverse applications remains a challenge. Here, a two-step process consisting of the synthesis of silicon nanoparticles (Si NPs) via laser ablation followed by plasma-enhanced chemical vapor deposition of hexagonal-boron-nitride (h-BN) nanowalls has been implemented to form hierarchical Si@h-BN NPs. Experimental and numerical analyses confirm that h-BN decoration modulates the color and brightness of the hierarchical NPs (i.e., shape, intensity, and spectral width of intrinsic optical resonances). Moreover, the color palette of the resulting Si@h-BN NPs can be remotely controlled by infrared laser irradiation. We reveal that this control is related to the modification of the complex morphology of the hierarchical Si@h-BN NPs through the mutual influence of Si NP and h-BN on each other. These results open a way for utilizing hierarchical nanostructures for light manipulation at the nanometer scale for optical data storage and ink-free coloring.

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Boron Nitride Nanosheets Synthesis in Thermal Plasma: An Experimental and Modelling Analysis

Alrebh

Meunier

2022

Plasma Chem Plasma Process

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PECVD synthesis of hexagonal boron nitride nanowalls from a borazine + ammonia mixture

Cited by 11 publications

References 14 publications

Orientation-controlled, low-temperature plasma growth and applications of h-BN nanosheets

Orientation-controlled, low-temperature plasma growth and applications of h-BN nanosheets

Hierarchical Hexagonal Boron Nitride Nanowall-Decorated Silicon Nanoparticles for Tunable Ink-Free Coloring

Boron Nitride Nanosheets Synthesis in Thermal Plasma: An Experimental and Modelling Analysis

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