PECVD synthesis of 2D nanostructured carbon material

Vizireanu, Sorin; Mitu, B.; Luculescu, C.; Nistor, L. C.; Dinescu, Gheorghe

doi:10.1016/j.surfcoat.2011.07.092

Cited by 29 publications

(25 citation statements)

References 26 publications

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“…The carbon nanostructures (CNW, VA-CNT, and CNP) that we discuss in the paper were obtained by plasma enhanced chemical vapor deposition (PECVD) in the same setup through reactive hydrocarbon/argon/hydrogen plasma jet [13][14][15]. In the synthesis of carbon materials, the following parameters were fixed: gas flow ratios Ar : H 2 : C 2 H 2 = 1050 : 25 : 1 sccm, pressure of 120 Pa, RF power of 300 W, and deposition time of 60 min.…”

Section: Synthesis Of Carbon Nanomaterialsmentioning

confidence: 99%

“…A PECVD system [13][14][15], based on low pressure expanding RF plasma jet generated in argon, in the presence of acetylene and hydrogen mixture, was used for the growth of tree type nanostructures (VA-CNT, CNP, and CNW). Radicals are formed by dissociation of acetylene through collisions into the plasma jet and are further transported to the substrate, where they sustain the growth process.…”

Section: Introductionmentioning

confidence: 99%

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Morphology, Microstructure, and Hydrogen Content of Carbon Nanostructures Obtained by PECVD at Various Temperatures

Gentoiu

Betancourt-Riera

Vizireanu

et al. 2017

Journal of Nanomaterials

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Carbon nanostructures were obtained by acetylene injection into an argon plasma jet in the presence of hydrogen. The samples were synthesized in similar conditions, except that the substrate deposition temperatures were varied, ranging from 473 to 973 K. A strong dependence of morphology, structure, and graphitization upon was found. We obtained vertical aligned carbon nanotubes (VA-CNTs) at low temperatures as 473 K, amorphous carbon nanoparticles (CNPs) at temperatures from about 573 to 673 K, and carbon nanowalls (CNWs) at high temperatures from 773 to 973 K. Fourier transform infrared spectroscopy, scanning electron microscopy, transmission electron microscopy, elastic recoil detection analysis, X-ray photoelectron spectroscopy, and Raman spectroscopy were used to substantiate the differences in these material types. It is known that hydrogen concentration modifies strongly the properties of the materials. Different concentrations of hydrogen-bonded carbon could be identified in amorphous CNP, VA-CNT, and CNW. Also, the H : C ratios along depth were determined for the obtained materials.

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Section: Synthesis Of Carbon Nanomaterialsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Morphology, Microstructure, and Hydrogen Content of Carbon Nanostructures Obtained by PECVD at Various Temperatures

Gentoiu

Betancourt-Riera

Vizireanu

et al. 2017

Journal of Nanomaterials

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“…9,24,25 However, as the growth progresses, the atomic hydrogen ( H * ) generated from the dissociation of CH4 by microwave energy also start etching the growing film. The concurrent growth and etching processes make the VGNs to gain height and decrease the number density.…”

Section: Sem Analysismentioning

confidence: 99%

“…The growth parameters such as feedstock gases and their composition, microwave power, electric field, temperature and pressure have strong influence on the morphology, growth rate and structural properties of the NGSs. [7][8][9] In order to realize and enhance the full potential of this material, it is necessary to have a clear understanding and fine control of their structural and physical properties by tuning the growth conditions.…”

Section: Introductionmentioning

confidence: 99%

Flipping growth orientation of nanographitic structures by plasma enhanced chemical vapor deposition

et al. 2015

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Nanographitic structures (NGSs) with multitude of morphological features are grown on SiO2/Si substrates by electron cyclotron resonance -plasma enhanced chemical vapor deposition (ECR-PECVD). CH4 is used as source gas with Ar and H2 as dilutants. Field emission scanning electron microscopy, high resolution transmission electron microscopy (HRTEM) and Raman spectroscopy are used to study the structural and morphological features of the grown films. Herein, we demonstrate, how the morphology can be tuned from planar to vertical structure using single control parameter namely, dilution of CH4 with Ar and/or H2. Our results show that the competitive growth and etching processes dictate the morphology of the NGSs. While Ar-rich composition favors vertically oriented graphene nanosheets, H2-rich composition aids growth of planar films.Raman analysis reveals dilution of CH4 with either Ar or H2 or in combination helps to improve the structural quality of the films. Line shape analysis of Raman 2D band shows nearly symmetric Lorentzian profile which confirms the turbostratic nature of the grown NGSs. Further, this aspect is elucidated by HRTEM studies by observing elliptical diffraction pattern. Based on these experiments, a comprehensive understanding is obtained on the growth and structural properties of NGSs grown over a wide range of feedstock compositions.This manuscript got published in RSC Adv., 2015,5, 91922-91931 web link : pubs.rsc.org/en/content/articlelanding/2015/ra/c5ra20820c

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“…The maze-like structure of the conducting carbon nanosheets or -walls leads to a large surfaceto-volume ratio what makes them a promising support material for electrochemical applications, such as fuel cells [6][7][8], super capacitors [9,10], lithium-ion batteries [11,12], field emitters [13] and solar cells [14][15][16]. The exact shape and the physical properties of these graphene-like nanostructures are strongly depending on the synthesis conditions and on the quality of the substrates used [17][18][19][20][21][22][23][24][25].…”

Section: Introductionmentioning

confidence: 99%

Synthesis of Carbon Nanowalls and Few-Layer Graphene Sheets on Transparent Conductive Substrates

Höltig

Ruhmlieb

Strelow

et al. 2014

Zeitschrift Für Physikalische Chemie

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Abstract:We report on the growth of carbon nanowalls and few-layer graphene sheets on glass substrates coated with different transparent conductive oxides or gold. The growth is accomplished by a capacitively-coupled radio-frequency plasma-enhanced chemical vapor deposition setup with a gas mixture of C 2 H 2 , H 2 , and Ar or He. This system allows the synthesis of thin vertical carbon nanosheets without catalyst at mild reaction conditions due to the low plasma density, which is preferable for sensitive substrate materials. In fact, the electrical properties of the transparent conductive indium tin oxide and fluorinedoped tin oxide stay intact upon carbon growth. Carbon nanowalls and few-layer graphene sheets on transparent conductive oxides are promising candidates for solar-cell applications while these nanostructures on gold coated glass can act as catalyst support material.

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PECVD synthesis of 2D nanostructured carbon material

Cited by 29 publications

References 26 publications

Morphology, Microstructure, and Hydrogen Content of Carbon Nanostructures Obtained by PECVD at Various Temperatures

Morphology, Microstructure, and Hydrogen Content of Carbon Nanostructures Obtained by PECVD at Various Temperatures

Flipping growth orientation of nanographitic structures by plasma enhanced chemical vapor deposition

Synthesis of Carbon Nanowalls and Few-Layer Graphene Sheets on Transparent Conductive Substrates

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