Patterning Spherical Surfaces at the Two‐Hundred‐Nanometer Scale Using Soft Lithography

Paul, Kateri E.; Prentiss, Mara; Whitesides, George M.

doi:10.1002/adfm.200304255

Cited by 90 publications

(69 citation statements)

References 23 publications

(15 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…[52,87] As mentioned in Section 3.7, electronics/optoelectronics in non-planar geometries can be difficult to achieve, due to the intrinsically planar nature of established fabrication techniques. Past and current work in hemispherical images range from the use of unconventional methods and materials for device processing directly on curved surfaces, [88][89][90][91] to techniques for self-assembly of device blocks [92][93][94] to means for deforming flat or structured silicon wafers or films. [50][51][52][95][96][97][98] An approach that uses the methods described in previous sections recently yielded the first working hemispherical electronic eye type cameras.…”

Section: Hemispherical Electronic Eye Camerasmentioning

confidence: 99%

Stretchable, Curvilinear Electronics Based on Inorganic Materials

et al. 2010

View full text Add to dashboard Cite

All commercial forms of electronic/optoelectronic technologies use planar, rigid substrates. Device possibilities that exploit bio-inspired designs or require intimate integration with the human body demand curvilinear shapes and/or elastic responses to large strain deformations. This article reviews progress in research designed to accomplish these outcomes with established, high-performance inorganic electronic materials and modest modifications to conventional, planar processing techniques. We outline the most well developed strategies and illustrate their use in demonstrator devices that exploit unique combinations of shape, mechanical properties and electronic performance. We conclude with an outlook on the challenges and opportunities for this emerging area of materials science and engineering.

show abstract

Section: Hemispherical Electronic Eye Camerasmentioning

confidence: 99%

Stretchable, Curvilinear Electronics Based on Inorganic Materials

et al. 2010

View full text Add to dashboard Cite

show abstract

“…[22,28,29] While these techniques have been used to successfully transfer patterns onto various nonplanar surfaces, each is limited in terms of versatility and/or scope of application.…”

mentioning

confidence: 99%

Fabrication of Flexible Binary Amplitude Masks for Patterning on Highly Curved Surfaces

Bowen

Nuzzo

2009

Adv Funct Materials

View full text Add to dashboard Cite

This paper describes soft lithography methods that expand current fabrication capabilities by enabling high‐throughput patterning on nonplanar substrates. These techniques exploit optically dense elastomeric mask elements embedded in a transparent poly(dimethylsiloxane) (PDMS) matrix by vacuum‐assisted microfluidic patterning, UV–ozone‐mediated irreversible sealing, and chemical etching. These protocols provide highly flexible photomasks exhibiting either positive‐ or negative‐image contrasts, which serve as amplitude masks for large‐area photolithographic patterning on a variety of curved (and planar) surfaces. When patterning on cylindrical surfaces, the developed masks do not experience significant pattern distortions. For substrates with 3D curvatures/geometries, however, the PDMS mask must undergo relatively large strains in order to make conformal contact. The new methods described in this report provide planar masks that can be patterned to compliantly compensate for both the displacements and distortions of features that result from stretching the mask to span the 3D geometry. To demonstrate this, a distortion‐corrected grid pattern mask was fabricated and used in conjunction with a homemade inflation device to pattern an electrode mesh on a glass hemisphere with predictable registration and distortion compensation. The showcased mask fabrication processes are compatible with a broad range of substrates, illustrating the potential for development of complex lithographic patterns for a variety of applications in the realm of curved electronics (i.e., synthetic retinal implants and curved LED arrays) and wide field‐of‐view optics.

show abstract

“…PDMS elastometer is extensively used as versatile molding material for micro and nanostructures [14,15]. In order to make the most accurate PDMS copies of the nanoposts we have tested several PDMS solutions and its treatment in vacuum.…”

Section: Resultsmentioning

confidence: 99%

Biomimetic soft lithography on curved nanostructured surfaces

Auzelyté

Flauraud

Cadarso

et al. 2012

Microelectronic Engineering

View full text Add to dashboard Cite

a b s t r a c tIn this paper a nano-molding process using a nature-created master is demonstrated. The eye of night moth Agotis exclamationis having 100 nm-scale structures on a curved surface is used as biomimetic master mold from which nanostructures are replicated onto a flat substrate. Suitable conditions of this simple and cost-efficient process allows for minimal texture damage. The fabrication consists of two steps: first, a negative PDMS mold of the curved eye surface is made, and second, the flexible mold is replicated into a hybrid UV sensitive polymer, on a flat substrate. An accurate copy of the master surface with dense arrays of 200 nm high and 100-120 nm wide posts are generated, thus preserving the integrity of the nanostructures. The known anti-reflecting optical properties of the moth eye were reproduced with a reflectivity reduced by a factor of 2.

show abstract

Patterning Spherical Surfaces at the Two‐Hundred‐Nanometer Scale Using Soft Lithography

Cited by 90 publications

References 23 publications

Stretchable, Curvilinear Electronics Based on Inorganic Materials

Stretchable, Curvilinear Electronics Based on Inorganic Materials

Fabrication of Flexible Binary Amplitude Masks for Patterning on Highly Curved Surfaces

Biomimetic soft lithography on curved nanostructured surfaces

Contact Info

Product

Resources

About