Patterning of multilayer dielectric optical coatings for multispectral CCDs

Barrie, James D.; Aitchison, Kenneth A.; Rossano, G. S.; Abraham, Michael H.

doi:10.1016/0040-6090(95)06888-0

Cited by 16 publications

(8 citation statements)

References 5 publications

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“…10 can be developed more efficiently by applying lift-off procedures, but problems arise if feature sizes smaller than 10 m are required. 7 The present minimum filter size attainable by the iterative procedure are stripe filters with 5-m features, as shown in Fig. 12.…”

Section: Resultsmentioning

confidence: 99%

Multispectral dielectric microfilter arrays for local resolving color sensors

1998

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Dielectric microfilters are designed and developed providing different filter functions on 3-in. substrates. Combining several coating procedures, microlithographic techniques, and dry-etching processes, spectral properties of basic filters are modified within patterns with feature sizes down to 5 mu m, resulting in large-area filter patterns (>5 cm2) with multiple spectral characteristics and vertical edge profiles. By applying these techniques within a three-step-iterative procedure red, green, and blue filters (RGB) are arranged edge to edge on one substrate to form a multispectral dielectric microfilter array for use as a key component in a local resolving color sensor. These microfilters are arranged in an array of 19 identical hexagons consisting of three rhombi each. The number of these arrays amounts to 81 on a single 3-in. substrate. A modular setup of a compact local resolving color sensor is presented, consisting of Si-p-i-n photoelectric cells, dielectric microfilter arrays , an imaging lens, and a final glass cover plate with an IR-blocking filter

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Section: Resultsmentioning

confidence: 99%

Multispectral dielectric microfilter arrays for local resolving color sensors

1998

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“…1(b), relies on a color-patterned FPA detector in conjunction with a dispersive element to capture the spatial and spectral information of a scene in a single compressive snapshot. The color-patterned FPA employs recent thin film coating advances and lithographic techniques that permit the implementation of multipatterned arrays of different optical filters [20][21][22][23][24]. Thus, SCCSI exploits the advantages of recent coating technology to obtain a richer encoding of the spatiospectral information of the source, allowing a considerably compact design without moving components.…”

Section: Introductionmentioning

confidence: 99%

Snapshot colored compressive spectral imager

2015

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Traditional spectral imaging approaches require sensing all the voxels of a scene. Colored mosaic FPA detector-based architectures can acquire sets of the scene's spectral components, but the number of spectral planes depends directly on the number of available filters used on the FPA, which leads to reduced spatiospectral resolutions. Instead of sensing all the voxels of the scene, compressive spectral imaging (CSI) captures coded and dispersed projections of the spatiospectral source. This approach mitigates the resolution issues by exploiting optical phenomena in lenses and other elements, which, in turn, compromise the portability of the devices. This paper presents a compact snapshot colored compressive spectral imager (SCCSI) that exploits the benefits of the colored mosaic FPA detectors and the compression capabilities of CSI sensing techniques. The proposed optical architecture has no moving parts and can capture the spatiospectral information of a scene in a single snapshot by using a dispersive element and a color-patterned detector. The optical and the mathematical models of SCCSI are presented along with a testbed implementation of the system. Simulations and real experiments show the accuracy of SCCSI and compare the reconstructions with those of similar CSI optical architectures, such as the CASSI and SSCSI systems, resulting in improvements of up to 6 dB and 1 dB of PSNR, respectively.

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“…In some spectral images, the scene is beamsplit into the desired wavelength components by using a prism assembly, and each of these images is captured in a separate detector array. Although this method provides the highest resolution, the sensing devices have significant size and weight disadvantages [6]. Most of the spectral images acquisition methods are related to scanning operations where multiple exposures are used causing motion artifacts [7].…”

Section: Introductionmentioning

confidence: 99%