Patterning of graphene for flexible electronics with remote atmospheric-pressure plasma using dielectric barrier

Abstract

We show results of the patterning of graphene layers on poly(ethylene terephthalate) (PET) films through remote atmospheric-pressure dielectric barrier discharge plasma. The size of plasma discharge electrodes was adjusted for large-area and role-to-role-type substrates. Optical emission spectroscopy (OES) was used to analyze the characteristics of charge species in atmospheric-pressure plasma. The OES emission intensity of the O2* peaks (248.8 and 259.3 nm) shows the highest value at the ratio of due to the highest plasma discharge. The PET surface roughness and hydrophilic behavior were controlled with CDA flow rate during the process. Although the atmospheric-pressure plasma treatment of the PET film led to an increase in the FT-IR intensity of C–O bonding at 1240 cm−1, the peak intensity at 1710 cm−1 (C=O bonding) decreased. The patterning of graphene layers was confirmed by scanning electron microscopy and Raman spectroscopy.

Discharge mode conversion of bending flexible electrodes

“…Lu et al also presented a flexible multi-pin plasma generator with movable electrodes, which would provide a large-area uniform plasma for the treatment of surfaces having different shapes [5]. Kim et al reported an inkjet-printed flexible DBD source, which could significantly inhibit the growth of fungi on the surface of blueberries [6]. Gershman et al demonstrated a combination of a flexible printed circuit design of a flex-DBD with H 2 O 2 for surface decontamination from (a) E-mail: x.tang@soton.ac.uk (b) E-mail: m.k.kim@soton.ac.uk (corresponding author) bacterial contaminants, which would result in a six-log reduction of bacterial load on a surface in 90 s [7].…”