Patterned Multipixel Membrane Mirror MEMS Optically Addressed Spatial Light Modulator With Megahertz Response

Griffith, G.; Haji-saeed, Bahareh; Sengupta, Sandip; Goodhue, W. D.; Khoury, Jed; Woods, Charles L.; Kierstead, John

doi:10.1109/lpt.2006.890029

Cited by 9 publications

(4 citation statements)

References 7 publications

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“…Using micromachined membrane mirrors an astounding 10 MHz modulation rate is possible. 39 Obviously, at such rates the camera needs to be replaced by a fast detector, such as a photodiode and dedicated hardware is needed for calculating the optimum wavefront. Moreover, when the SLM is operated at high speed, sending full frames to the modulator will take considerable bandwidth and processing power.…”

Section: Discussionmentioning

confidence: 99%

Focusing light through living tissue

Vellekoop

Aegerter

2010

SPIE Proceedings

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Tissues such as skin, fat or cuticle are non-transparent because inhomogeneities in the tissue scatter light. We demonstrate experimentally that light can be focused through turbid layers of living tissue, in spite of scattering. Our method is based on the fact that coherent light forms an interference pattern, even after hundreds of scattering events. By spatially shaping the wavefront of the incident laser beam, this interference pattern was modified to make the scattered light converge to a focus. In contrast to earlier experiments, where light was focused through solid objects, we focused light through living pupae of Drosophila melanogaster. We discuss a dynamic wavefront shaping algorithm that follows changes due to microscopic movements of scattering particles in real time. We relate the performance of the algorithm to the measured timescale of the changes in the speckle pattern and analyze our experiment in the light of Laser Doppler flowmetry. Applications in particle tracking, imaging, and optical manipulation are discussed. ABSTRACTTissues such as skin, fat or cuticle are non-transparent because inhomogeneities in the tissue scatter light. We demonstrate experimentally that light can be focused through turbid layers of living tissue, in spite of scattering. Our method is based on the fact that coherent light forms an interference pattern, even after hundreds of scattering events. By spatially shaping the wavefront of the incident laser beam, this interference pattern was modified to make the scattered light converge to a focus. In contrast to earlier experiments, where light was focused through solid objects, we focused light through living pupae of Drosophila melanogaster. We discuss a dynamic wavefront shaping algorithm that follows changes due to microscopic movements of scattering particles in real time. We relate the performance of the algorithm to the measured timescale of the changes in the speckle pattern and analyze our experiment in the light of Laser Doppler flowmetry. Applications in particle tracking, imaging, and optical manipulation are discussed.

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Section: Discussionmentioning

confidence: 99%

Focusing light through living tissue

Vellekoop

Aegerter

2010

SPIE Proceedings

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“…Recently, an optically driven membrane mirror has been realized for near infrared applications, where the addressing was through a photoconductive substrate, nevertheless the membrane and the associated driving were pixellated [6][7][8] , whereas in our case the photo-addressing is continuous. The device is schematically represented in Fig.1.…”

Section: Description Of the Devicementioning

confidence: 86%

Optically addressable deformable membrane mirror

et al. 2010

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“…The MEMS spring plate mirrors were fabricated by depositing low stress Si 3 N 4 using a mixed frequency CVD (Chemical Vapor Deposition) technique [3], patterning, selectively releasing from the InP back substrates [1], followed by gold deposition. Sputtered TaN (Tantalum Nitride) thin films with sheet resistances of approximately 1 KOhms per square were also patterned around the spring plates to achieve up to 2 MOhms load resistors as shown in Fig.…”

Section: Device Fabricationmentioning

confidence: 99%

“…In earlier work [1,2] low stress Si 3 N 4 (Silicon Nitride) spring plate mirrors for such applications were successfully demonstrated. Future applications demand optically as well as individually addressable arrays of such mirrors.…”

Section: Introductionmentioning

confidence: 99%