Patterned Liquid Micro Rails for the Transport of Micrometer Sized Chips
Pedro H. O. Moreira,
Alper K. Soydan,
Johannes Reiprich
et al.
Abstract:Transport and alignment of microscopic chips are important steps in microelectronics component integration with common approaches being pick‐and‐place, microfluidics, parallel transfer and self‐assembly. An alternate transport approach of microscopic chips is proposed using patterned liquid micro rails as chaperones. The surface free energy and interfacial free energy minimization of all constituents enable the creation of stable pathways. This allows for chip‐attachment to rails, while the liquid layer lubric… Show more
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